Tantalum Oxide Coating for Liquid Ejecting Head Erosion
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Solution Overview
Problem
Existing liquid ejecting heads, such as inkjet recording heads, face challenges with erosion of vibrating plates due to ink, leading to instability in vibrating properties and difficulties in achieving a thin, high-density design, particularly when protection films like silicon oxide are used.
Innovation Solution
A tantalum oxide film formed by atomic layer deposition is applied to the inner wall of the pressure generation chamber, enhancing film density and resistance to liquid erosion, allowing for a thinner film that stabilizes the vibrating plate's displacement and improves the piezoelectric actuator's performance, enabling a thin and stable liquid ejecting head.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a protection film of silicon oxide is provided on the flow path formation substrate side of the vibrating plate, then erosion resistance is improved, but pin holes or defects occur on the protection film leading to negative impact on vibrating property
Solution Approach 1:
The patent changes the material parameter from silicon oxide to tantalum oxide, which has superior erosion resistance and forms a pin-hole-free film structure. This material substitution resolves the contradiction by providing both high reliability against erosion and high manufacturing precision without defects.
Solution Approach 2:
The patent employs a composite structure combining tantalum oxide protection film with the vibrating plate and flow path formation substrate. This composite material approach creates a multi-functional layer that simultaneously provides erosion resistance and maintains film integrity without pin holes.
2Length of moving object
If the protection film is made thin to realize high density of nozzle openings and thin head shape, then device miniaturization is improved, but pin holes or defects occur more easily on the protection film
Solution Approach 1:
The patent changes the material properties from silicon oxide to tantalum oxide, which allows the protection film to be made thin while maintaining integrity. The inherent pin-hole-free structure of tantalum oxide enables thin film design without compromising reliability, thus achieving both miniaturization and film integrity.
3Reliability
If a protection film is provided to prevent erosion of the vibrating plate, then erosion resistance is improved, but the vibrating plate deformation stability is negatively affected
Solution Approach 1:
The patent changes the protection film material to tantalum oxide, which provides erosion resistance while maintaining a pin-hole-free structure that does not interfere with the vibrating plate's deformation. This ensures both erosion resistance and stable vibrating properties without the defects that would compromise deformation stability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The tantalum oxide film effectively suppresses erosion and variation in vibrating properties, allowing for a miniaturized and stable liquid ejecting apparatus with improved displacement and discharging properties.
Implementation Method 1
a tantalum oxide film which is formed by atomic layer deposition is provided at least on an inner wall of the pressure generation chamber
Implementation Method 2
a piezoelectric actuator which is a piezoelectric element on one surface side of a flow path formation substrate
Data Source
AI summary
According to a liquid ejecting head, it is possible to suppress erosion of a vibrating plate by liquid, suppress generation of variation in a vibrating property, and realize a thin head. The liquid ejecting head includes a flow path formation substrate on which a pressure generation chamber communicating with nozzle openings for discharging liquid is provided, an elastic film which is provided on one surface side of the flow path formation substrate and seals the pressure generation chamber, and a piezoelectric actuator which is a pressure generation unit which is provided on the elastic film to deform the elastic film. A tantalum oxide film which is formed by atomic layer deposition is provided at least on an inner wall of the pressure generation chamber.