Tape Tension Checking via Surface Pattern Deformation

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Solution Overview

Problem

Existing methods for attaching and expanding tapes on workpieces, such as semiconductor wafers, face issues with improper tension measurement, which can lead to nonuniform force application and incomplete division of chips, and current noncontact tension meters using sound waves risk damaging the workpiece or providing inaccurate readings.

Innovation Solution

A tape with a pattern on its surface for visual tension checking, allowing for the determination of proper attachment and expansion conditions by observing deformation, eliminating the need for sound wave-based measurement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a noncontact type tension meter using sound waves is used to measure tape tension, then tension measurement is enabled, but the workpiece may be broken due to vibration or measurement may be inaccurate due to ambient sound

Engineering Contradiction:

Improvetension measurement accuracyVSAvoidworkpiece damage risk

Core Design Contradiction:

Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent replaces the acoustic field-based tension meter with a visual inspection system. The pattern on the tape surface deforms in response to tension, and this deformation is observed visually (or optically) rather than using sound waves. This substitution eliminates the harmful vibrations and ambient sound interference while maintaining tension measurement capability.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The pattern on the tape surface serves as an intermediary that translates tension into visible deformation. Instead of directly measuring tension with a sound wave device that risks damaging the workpiece, the pattern acts as a mediator that converts the physical tension state into an observable visual change, enabling indirect but safe measurement.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Manufacturing precision

If proper tension is applied to the tape during attachment, then uniform force application is achieved, but tension control becomes critical and difficult

Engineering Contradiction:

Improveuniform force applicationVSAvoidtension control difficulty

Core Design Contradiction:

Manufacturing precisionVSEase of operation

Solution Approach 1:

The tape itself provides the tension indication function through the pattern. The pattern deforms automatically in response to applied tension, providing self-diagnosis capability. This eliminates the need for complex external tension control systems or skilled operators, as the tape self-indicates whether proper tension has been applied.

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The pattern on the tape surface changes its visual appearance (deformation, spacing, orientation) in response to tension. This visual change provides immediate feedback to the operator about the tension state, making it easy to determine when proper tension has been applied without requiring complex measurement equipment or expertise.

Inventive Principle:

Principle #32Color changes

3Measurement precision

If a pattern is provided on the whole surface of the tape, then tension checking is facilitated across the entire tape, but manufacturing complexity increases

Engineering Contradiction:

Improvetension checking accuracyVSAvoidtape manufacturing complexity

Core Design Contradiction:

Measurement precisionVSEase of manufacture

Solution Approach 1:

The pattern uses simple geometric shapes or markings that change their apparent parameters (spacing, orientation, deformation) in response to tension. These are straightforward visual elements that can be incorporated into the tape manufacturing process using conventional techniques such as printing or embossing, avoiding complex structures while maintaining effective tension indication across the entire tape surface.

Inventive Principle:

Principle #35Parameter changes

Data Source

PatentUS11222806B2Tape, tape attaching method, and tape expanding method

Publication Date: 2022.01.11 DISCO CORP

AI summary

A tape adapted to be attached to a workpiece. The tape has a pattern for checking tension applied to the tape. The pattern is provided on the whole or part of the front side of the tape. The tension may be checked before expansion of the tape, during expansion of the tape, or after expansion of the tape. The tension may be checked after attaching the tape to the workpiece. By using a tape expander having four holding units holding the four side edge portions of the tape, the tape is expanded by moving the four holding units holding the tape so that the holding units are moved away from the workpiece. Deformation of the pattern due to the expansion of the tape is checked by visual inspection or by using an imaging camera to thereby determine the attached condition of the tape to the workpiece.