Tapered EUV Discharge Electrodes for Light Extraction
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Solution Overview
Problem
Existing EUV light source devices face inefficiencies in light output due to electrode shapes that block light and restrict energy beam angles, leading to suboptimal plasma generation and light extraction.
Innovation Solution
The use of disc-shaped discharge electrodes with inclined surfaces on both the energy beam incident and light extraction sides, allowing for adjustable angles of incidence and extraction, enhancing energy beam intensity and light extraction efficiency without complex manufacturing processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If disc-shaped discharge electrodes are used with flat surfaces, then the structure is simple and easy to manufacture, but the electrodes block part of the EUV light by the end portions, reducing light extraction efficiency
Solution Approach 1:
The patent applies curvature by forming an inclined surface on the peripheral edge of the disc-shaped electrode, replacing the flat surface with a curved/angled surface. This inclined surface allows EUV light to escape at a larger angle without being blocked by the electrode end, improving light extraction efficiency while maintaining manufacturing simplicity through a single inclination angle design.
2Device complexity
If flat discharge electrodes are used, then the device structure is simple, but the incident angle of the energy beam is restricted, making it impossible to direct the energy beam at a desired angle
Solution Approach 1:
The inclined surface on the electrode periphery creates angular flexibility, allowing the energy beam to incident at desired angles. The inclination angle of the surface can be adjusted to match different energy beam incident angles, providing adaptability without increasing overall device complexity.
3Ease of manufacture
If the electrode thickness is uniform, then the manufacturing process is simple, but the extraction angle of the EUV light cannot become a desired angle
Solution Approach 1:
The patent applies local quality by creating an inclined surface only on the peripheral edge of the electrode where light extraction is needed, while the central portion maintains uniform thickness. This localized modification achieves the desired extraction angle without requiring complex manufacturing processes affecting the entire electrode structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables stable and efficient generation of EUV light by optimizing the angles of energy beam incidence and light extraction, improving plasma production and output stability.
Implementation Method 1
an energy beam irradiation unit that irradiates the source material on curved surfaces of the discharge electrodes with an energy beam to vaporize the source material
Implementation Method 2
A DPP type EUV light source device applies a high voltage across a pair of electrodes, which is supplied with a discharge gas containing an extreme ultraviolet light emission seed, to generate high-density and high-temperature plasma upon electric discharging
Implementation Method 3
heats and excites an extreme ultraviolet emission seed (EUV emission seed) to generate high temperature plasma, and extracts EUV light from the high temperature plasma
Data Source
AI summary
An extreme ultraviolet light source device includes a pair of disk-shaped discharge electrodes which face each other with their peripheral portions being spaced from each other, a pulsed power supply unit for supplying pulsed power to the discharge electrodes, a raw material supply unit for supplying onto the discharge electrodes raw materials that emit extreme ultraviolet light, and an energy beam irradiation unit for irradiating the raw materials on curved surfaces of the discharge electrodes with an energy beam to vaporize the raw materials. At least one of the paired discharge electrodes has a tapered surface at a peripheral portion of at least one of two circular surfaces thereof. The tapered surface inclines radially outward such that the thickness of the discharge electrode decreases in the radially outward direction.