Tapered Fluidized Bed Reactor for Polysilicon Production

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Fluidized bed reactors for polycrystalline silicon production face challenges such as hot spot formation leading to silicon deposition, slugging due to large gas bubbles, increased heat requirements with reactor diameter, contamination from fines, and inefficiencies in scaling up due to bubble growth and heat transfer limitations.

Innovation Solution

A fluidized bed reactor design featuring a conical gas distributor, tapered section, and expanded head with staged gas injection and cooling, which reduces bubble growth, enhances heat transfer, and maintains particle segregation and purity, while preventing slugging and contamination.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the reactor diameter is increased to scale up production, then productivity increases, but heat transfer efficiency deteriorates because wall surface area per unit length increases linearly while heat requirement increases with the square of diameter

Engineering Contradiction:
Improveproduction capacityVSAvoidheat transfer efficiency
Core Design Contradiction:
ProductivityVSUse of energy by moving object

Solution Approach 1:

The reactor is divided into multiple heating zones with independent temperature control, allowing optimized heat distribution across different sections. This segmentation enables efficient heat utilization while accommodating larger reactor dimensions for increased production capacity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the reactor are provided with tailored heating characteristics - the wall heating is supplemented with localized internal heating elements in specific zones where heat transfer is most critical, creating non-uniform but optimized thermal conditions throughout the reactor volume

Inventive Principle:
Principle #3Local quality

2Use of energy by moving object

If the bed height is increased to deliver necessary energy, then heat transfer improves, but bubble growth rate increases leading to excessive slugging

Engineering Contradiction:
Improveenergy deliveryVSAvoidfluidization stability
Core Design Contradiction:
Use of energy by moving objectVSReliability

Solution Approach 1:

The fluidized bed is divided into multiple heating zones with independent temperature and gas flow control. This allows energy delivery to be optimized in lower zones while maintaining stable fluidization in upper zones, preventing excessive bubble growth and slugging

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The reactor employs dynamic control of gas distribution and heating parameters across different zones, adjusting operating conditions in real-time to maintain optimal fluidization stability while delivering necessary energy for the deposition process

Inventive Principle:
Principle #15Dynamics

3Use of energy by moving object

If resistance heating is used to heat the wall, then heat transfer is facilitated, but silicon deposition on the wall and distributor occurs due to high temperature and reactive feed gas

Engineering Contradiction:
Improveheat transferVSAvoidsilicon deposition
Core Design Contradiction:
Use of energy by moving objectVSObject-generated harmful factors

Solution Approach 1:

The reactor employs localized cooling of the wall and distributor surfaces in regions where silicon deposition is most problematic, while maintaining high temperature in the bulk bed for heat transfer. This creates a temperature gradient that prevents wall deposition while preserving necessary thermal conditions for the deposition process

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

A protective gas flow or coating layer is introduced as an intermediary between the hot reactive feed gas and the wall/distributor surfaces, preventing direct contact and silicon deposition while allowing heat transfer to continue through the intermediate layer

Inventive Principle:
Principle #24Intermediary (Mediator)

4Use of energy by moving object

If the maximum heat flux from the wall is increased, then energy delivery improves, but thermal stress on the wall material increases beyond allowable limits

Engineering Contradiction:
Improveheat fluxVSAvoidthermal stress
Core Design Contradiction:
Use of energy by moving objectVSStress or pressure

Solution Approach 1:

The heating system is segmented into multiple zones with independent heat flux control, allowing high heat flux to be applied in specific regions where it is most needed while maintaining lower heat flux in other regions, thereby distributing thermal stress across the wall material within allowable limits

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The reactor employs variable heat flux parameters across different zones and time periods, adjusting the thermal loading to optimize energy delivery while keeping wall thermal stress within material limits through controlled parameter variation

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design effectively manages heat transfer and bubble growth, reduces slugging, and maintains particle segregation and purity, enabling efficient scaling of polycrystalline silicon production by controlling gas flow and temperature, thus improving the commercial viability of the process.

Implementation Method 1

fluidized bed reactor (FBR)... bubbles grow quickly in fluidized beds containing relatively large particles... Slugging refers to formation of gas bubbles that are so large that they disrupt fluidization

Methodology Applied
Scientific EffectFluidization: Fluidisation

Implementation Method 2

the wall surrounding the bed of silicon particles must be heated to a temperature higher than the average bed temperature to facilitate heat transfer

Methodology Applied
Scientific EffectHeat transfer: Conduction (thermal)

Implementation Method 3

by use of resistance heating, microwave energy, radio frequency inductive heating, or infrared radiation

Methodology Applied
Scientific EffectResistive heating: Joule Heating

Implementation Method 4

an expanded head above the tapered section wherein a diameter of the expanded head is larger than a diameter of the tapered section and wherein the slope or the expanded head with respect to a horizontal plane is at least 40 degrees

Methodology Applied
Scientific EffectGravitational separation: Gravitation

Implementation Method 5

conical gas distributor... staged gas injection... which reduces bubble growth, enhances heat transfer, and maintains particle segregation and purity

Methodology Applied
Scientific EffectGas distribution:

Data Source

PatentEP2890635B1Tapered fluidized bed reactor and process for its use
Publication Date: 2021.04.28 HEMLOCK SEMICONDUCTOR OPERATIONS LLC
  • EP2890635B1 patent drawingFigure 1
  • EP2890635B1 patent drawingFigure 2
  • EP2890635B1 patent drawingFigure 3~4C

AI summary

A fluidized bed reactor includes a gas distributor, a tapered section above the gas distributor, and an expanded head above the tapered section. The gas distributor defines a plurality of inlets surrounding a product withdrawal tube, which extends away from the fluidized bed reactor. The fluidized bed reactor is useful in a process for fluidizing relatively large particles, such as Geldart Group B particles and/or Geldart Group D particles, where said particles are in a bubbling fluidized bed residing, in whole or in part, in the tapered section. The fluidized bed reactor and process may be used for manufacturing polycrystalline silicon.