Tapered Magnetic Memory Device Stray Field Suppression
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Solution Overview
Problem
Magnetic memory devices face challenges in suppressing stray magnetic fields from the reference layer to the storage layer, leading to write errors and poor write characteristics.
Innovation Solution
A magnetic memory device structure is developed with a stacked configuration including a storage layer with variable magnetization, a tunnel barrier layer, a reference layer with fixed magnetization, and a shift canceling layer, where the pattern of the storage layer's lower surface is inside its upper surface, and the reference layer's upper surface is inside its lower surface, utilizing specific materials like CoFeB, MgO, CoPt, and CoPt for the layers, and ion beam etching to form a forward and reverse tapered shape, reducing the influence of stray magnetic fields.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional magnetoresistive element structure is used with flat layers, then the device structure is simple and easy to manufacture, but stray magnetic fields from the reference layer strongly affect the storage layer causing write errors
Solution Approach 1:
The patent applies curvature by forming tapered side surfaces on the magnetic layers instead of flat surfaces. The storage layer has a first tapered side surface, and the reference layer has a second tapered side surface. This curved/tapered geometry reduces the volume of the magnetic layers and confines the stray magnetic field generation region, thereby improving write characteristics while maintaining manufacturing feasibility through ion beam etching processes.
Solution Approach 2:
The patent segments the magnetic layer structure by introducing intermediate nonmagnetic layers between the storage layer and reference layer. These nonmagnetic layers act as magnetic field shields and divide the magnetic structure into distinct functional segments. The segmentation allows better control over stray magnetic field propagation while maintaining a manageable layered structure that can be manufactured sequentially.
2Reliability
If the storage layer and reference layer are made with large area patterns, then the signal strength is higher, but the stray magnetic field influence on the storage layer increases causing write errors
Solution Approach 1:
The tapered side surfaces reduce the effective volume of the magnetic layers compared to cylindrical or rectangular structures of the same top area. This curvature reduces the magnetic moment and consequently the stray magnetic field strength while preserving the large top area for sufficient signal strength. The ion beam etching process creates this tapered geometry that simultaneously achieves both objectives.
Solution Approach 2:
The patent introduces nonmagnetic intermediate layers between the storage layer and reference layer. These intermediary layers act as magnetic field shields that block and attenuate the stray magnetic field propagation from the reference layer to the storage layer. This allows the magnetic layers to maintain larger areas for signal strength while the intermediaries prevent harmful field interactions.
3Reliability
If ion beam etching is used to create tapered shapes, then stray magnetic fields are reduced improving write characteristics, but the manufacturing process becomes more complex
Solution Approach 1:
The patent replaces conventional photolithographic patterning and planar etching methods with ion beam etching to create the tapered structures. While ion beam etching is more complex than standard photolithography, it enables the formation of precise tapered geometries that cannot be achieved with conventional methods. The process substitution is justified by the significant improvement in write characteristics and reduction of write errors.
Solution Approach 2:
The patent changes the etching parameters by using ion beam etching with specific angles and energies to create tapered side surfaces. By controlling the ion beam incidence angle and etching conditions, the desired tapered geometry is achieved. This parameter change in the manufacturing process enables the formation of structures that reduce stray magnetic fields while maintaining manufacturing feasibility through process optimization.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively suppresses stray magnetic fields, enhancing write characteristics and reducing write errors by minimizing the impact of stray magnetic fields on the storage layer, resulting in improved data storage reliability.
Implementation Method 1
utilizing specific materials like CoFeB, MgO, CoPt, and CoPt for the layers, and ion beam etching to form a forward and reverse tapered shape
Implementation Method 2
The magnetoresistive element comprises a storage layer having a variable magnetization direction, a tunnel barrier layer provided on the storage layer, a reference layer provided on the tunnel barrier layer and having a fixed magnetization direction. The magnetoresistive element can store binary data based on the relationship between the magnetization direction of the storage layer and the magnetization direction of the reference layer.
Implementation Method 3
it is important to suppress a stray magnetic field applied from the reference layer to the storage layer in order to realize good write characteristics free of write errors
Data Source
AI summary
According to one embodiment, a magnetic memory device includes a stacked structure including a first magnetic layer having a variable magnetization direction, a nonmagnetic layer provided on the first magnetic layer, and a second magnetic layer provided on the nonmagnetic layer and having a fixed magnetization direction, wherein as viewed in a direction parallel to a stacked direction of the stacked structure, a pattern of a lower surface of the first magnetic layer is located inside a pattern of an upper surface of the first magnetic layer, and a pattern of an upper surface of the second magnetic layer is located inside a pattern of a lower surface of the second magnetic layer or substantially conforms to the pattern of the lower surface of the second magnetic layer.


