Tapered Micromachined Strut for MEMS Mirror Flatness

The strut cross-sectional dimensions are varied along its length, with the width and thickness being smaller at the center and larger at the ends. This non-uniform geometry provides localized reinforcement where needed (at the ends near the mirror edges) while minimizing mass at the center, thereby reducing the moment of inertia and improving response time without sacrificing mirror flatness.

The geometric parameters of the strut (width, thickness) are changed along its longitudinal axis to create a tapered profile. This parameter variation optimizes the distribution of material, providing sufficient reinforcement for mirror flatness while minimizing the moment of inertia for faster response time.

The tapered strut geometry concentrates material at the ends where reinforcement is needed for mirror flatness, while the reduced central section allows greater angular deflection. This local variation in cross-sectional dimensions enables the mirror to achieve a wider range of motion without compromising flatness.

The strut features rounded corners and edges instead of sharp rectangular profiles. This curved geometry reduces stress concentration and allows the strut to flex more easily during mirror deflection, thereby increasing the achievable range of motion while maintaining structural integrity for flatness control.

The strut thickness is increased only at the end regions where reinforcement is most needed to maintain mirror flatness, while the central portion maintains a smaller thickness. This localized thickening provides the necessary reinforcing effect without significantly increasing the overall moment of inertia, thus preserving fast response time.

The thickness parameter of the strut is varied along its length, creating a non-uniform profile that is thicker at the ends and thinner in the center. This parameter change optimizes the balance between reinforcing effect (strength) and moment of inertia (response time).