Tapered Optical Attenuator with Dopant Gradient for Semiconductor Waveguides

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Solution Overview

Problem

Existing semiconductor structures with waveguides and optical attenuators face challenges in achieving efficient optical signal transmission due to limitations in optical transmission performance, particularly in terms of attenuation loss and device size.

Innovation Solution

The semiconductor structure incorporates a waveguide connected to an optical attenuator with a tapered shape and a doped structure, where the dopant concentration gradient allows for improved light absorption and attenuation loss, while maintaining a compact device size.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If a conventional optical attenuator design is used, then the device structure is simple, but the attenuation loss is insufficient and device size increases

Engineering Contradiction:
Improveattenuation lossVSAvoiddevice size
Core Design Contradiction:
Loss of energyVSVolume of moving object

Solution Approach 1:

The optical attenuator employs a doped structure with a dopant concentration gradient, where the dopant concentration is highest at the tip and decreases toward the base. This localized variation in dopant concentration creates regions of different light absorption coefficients within the attenuator, enabling enhanced attenuation performance in specific zones without requiring the entire device to be larger. The tapered geometry further concentrates light absorption in the high-dopant-concentration region at the tip, achieving high attenuation loss in a compact form factor.

Inventive Principle:
Principle #3Local quality

2Volume of moving object

If the optical attenuator size is reduced, then the device integration is improved, but the attenuation loss performance deteriorates

Engineering Contradiction:
Improvedevice sizeVSAvoidattenuation loss
Core Design Contradiction:
Volume of moving objectVSLoss of energy

Solution Approach 1:

The invention changes the physical parameters of the optical attenuator by introducing a dopant concentration gradient and tapered geometry. The dopant concentration varies continuously from the base to the tip, creating a gradient in the light absorption coefficient. This parameter variation allows the attenuator to achieve high attenuation loss in a compact size by concentrating absorption in the tapered tip region where the dopant concentration is highest, rather than requiring a uniformly large structure.

Inventive Principle:
Principle #35Parameter changes

3Loss of energy

If a doped structure with dopant concentration gradient is implemented, then the light absorption is enhanced, but the manufacturing complexity increases

Engineering Contradiction:
Improvelight absorptionVSAvoidmanufacturing complexity
Core Design Contradiction:
Loss of energyVSEase of manufacture

Solution Approach 1:

The doped structure with dopant concentration gradient implements local quality by creating spatially varying dopant concentrations within the optical attenuator. The dopant concentration is highest at the tip and decreases toward the base, creating localized regions of different light absorption properties. This approach enhances light absorption where needed (at the tapered tip) while using lower dopant concentrations in other regions, optimizing performance without requiring uniformly high doping throughout the entire structure, which would be more difficult to manufacture.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances the attenuation loss of the optical attenuator by concentrating light absorption in regions with high dopant concentration, thereby improving the overall optical signal transmission efficiency and reducing device size.

Implementation Method 1

The optical attenuator has a first surface and a second surface opposite the first surface, and a cross-sectional width of the optical attenuator decreases from the first surface to the second surface

Methodology Applied
Scientific EffectLight absorption: Absorption (EM radiation)

Data Source

PatentUS20250164691A1Semiconductor structure and method for forming the same
Publication Date: 2025.05.22 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250164691A1 patent drawing
  • US20250164691A1 patent drawing
  • US20250164691A1 patent drawing

AI summary

A semiconductor structure includes a waveguide and an optical attenuator. The waveguide is disposed over an insulating layer and configured to guide light. The optical attenuator is connected to the waveguide. The optical attenuator has a first surface and a second surface opposite the first surface, and a cross-sectional width of the optical attenuator decreases from the first surface to the second surface.