Tapered Photodetector Thickness for Back Reflection Reduction

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Solution Overview

Problem

Photonics chips face significant back reflection due to refractive index mismatch between photodetector and waveguide materials, leading to reduced responsivity and quantum efficiency, especially for transverse magnetic mode light pulses.

Innovation Solution

A structure comprising a waveguide core, a light-absorbing layer with a sidewall, and a taper that extends laterally from the sidewall to overlap with the waveguide core, with varying thickness to reduce refractive index mismatch and minimize back reflection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If a photodetector is integrated with a waveguide on a photonics chip, then layout area and integration are improved, but back reflection increases due to refractive index mismatch

Engineering Contradiction:
Improvelayout areaVSAvoidback reflection
Core Design Contradiction:
Area of stationary objectVSObject-generated harmful factors

Solution Approach 1:

A tapered layer is introduced as an intermediary structure between the waveguide core and the light-absorbing layer. This taper has a thickness that varies with position, creating a gradual transition in refractive index that mediates the optical coupling between the waveguide and photodetector, thereby reducing back reflection while maintaining integration benefits

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The refractive index transition is achieved by varying the thickness parameter of the tapered layer across its structure. The thickness changes from zero at one interface to a maximum value at the other interface, creating a continuous parameter gradient that reduces optical impedance mismatch and minimizes back reflection

Inventive Principle:
Principle #35Parameter changes

2Ease of manufacture

If photodetector material is directly coupled with waveguide material, then manufacturing simplicity is improved, but responsivity and quantum efficiency decrease due to back reflection

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidresponsivity
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The tapered layer serves as an intermediary structure that can be formed using standard semiconductor fabrication techniques such as selective epitaxial growth or selective deposition. This approach maintains manufacturing simplicity while the tapered geometry provides the optical function of reducing back reflection, thereby preserving both ease of manufacture and device performance

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The tapered layer is selectively formed only in specific regions where optical coupling occurs, rather than uniformly across the entire device. This localized approach maintains simplicity in non-critical areas while providing the necessary optical optimization at the waveguide-photodetector interface, balancing manufacturing ease with performance requirements

Inventive Principle:
Principle #3Local quality

3Manufacturing precision

If a uniform thickness layer is used between waveguide and photodetector, then manufacturing precision is improved, but back reflection remains severe

Engineering Contradiction:
Improvelayer thickness uniformityVSAvoidback reflection
Core Design Contradiction:
Manufacturing precisionVSObject-generated harmful factors

Solution Approach 1:

Instead of a symmetric uniform thickness layer, an asymmetric tapered structure is employed where the thickness varies systematically from one interface to the other. This asymmetric geometry creates a gradual refractive index transition that reduces back reflection, while the taper can still be formed with controlled precision using standard fabrication techniques

Inventive Principle:
Principle #4Asymmetry

4Device complexity

If the photodetector structure is simplified without a taper, then device complexity is reduced, but optical return loss increases

Engineering Contradiction:
Improvestructure complexityVSAvoidoptical return loss
Core Design Contradiction:
Device complexityVSLoss of energy

Solution Approach 1:

The tapered layer acts as an intermediary optical element that can be integrated into existing photodetector architectures without fundamentally redesigning the device. It adds minimal structural complexity while effectively reducing optical return loss through its gradual refractive index transition, representing a low-complexity solution to an optical performance problem

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The taper effectively reduces back reflection, enhancing responsivity and quantum efficiency by mitigating the refractive index mismatch between the waveguide core and the light-absorbing layer, particularly for transverse magnetic mode light pulses.

Implementation Method 1

back reflection due to a refractive index mismatch between the material of the photodetector and the material of a waveguide

Methodology Applied
Scientific EffectRefraction: Refraction

Implementation Method 2

photodetectors that convert optical signals in the form of modulated light pulses into an electrical signal

Methodology Applied
Scientific EffectPhotoelectric Effect: Photoelectric Effect

Data Source

PatentUS11520113B1Photodetectors and terminators including a tapered thickness
Publication Date: 2022.12.06 GLOBALFOUNDRIES US INC
  • US11520113B1 patent drawing
  • US11520113B1 patent drawing
  • US11520113B1 patent drawing

AI summary

Structures for a photodetector or terminator and methods of fabricating a structure for a photodetector or terminator. The structure includes a waveguide core, a light-absorbing layer having a sidewall, and a taper positioned adjacent to the sidewall of the light-absorbing layer. The taper extends laterally from the sidewall of the light-absorbing layer to overlap with the waveguide core, and the taper has a thickness that varies with position relative to the sidewall of the light-absorbing layer. For example, the thickness of the taper may decrease with increasing distance from the sidewall of the light-absorbing layer.