Tapered Planar Waveguide Coupling for Semiconductor Optical Devices

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Solution Overview

Problem

Coupled waveguide systems face low coupling efficiencies due to mismatched waveguide modes between semiconductor optical devices and optical fibers, leading to high production costs and reproducibility issues.

Innovation Solution

A planar waveguide apparatus with a passive buried rib waveguide and an overlying tapered waveguide for improved mode expansion and coupling, featuring a core layer surrounded by cladding material and optional active material for optical gain, which reduces dependency on etch depth and overgrowth, and includes features like breaks or curved sections to manage parasitic modes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a secondary waveguide is used to expand the mode spot size of a semiconductor optical device, then the mode size mismatch between waveguide and fiber is reduced, but fabrication yield and reproducibility deteriorate due to critical dependency on etch depth and overgrowth of exposed quaternary layers

Engineering Contradiction:
Improvecoupling efficiencyVSAvoidfabrication yield
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The waveguide structure is segmented into distinct functional regions: an active waveguide region with quaternary layers for optical gain, and a passive waveguide region with etch-stop layers for precise mode expansion. This segmentation allows independent optimization of each region's fabrication parameters, reducing the critical dependency on etch depth that plagues monolithic structures.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Etch-stop layers are incorporated preliminarily into the waveguide structure before the final etching process. These pre-placed layers provide predetermined etch depth references that stop the etching process at precise locations, eliminating the need for highly precise control of etch depth and improving fabrication yield and reproducibility.

Inventive Principle:
Principle #10Preliminary action

2Ease of manufacture

If the passive waveguide uses a buried rib structure with core layer completely etched through, then dependency on etch depth and overgrowth issues are reduced, but device complexity increases due to additional fabrication steps

Engineering Contradiction:
Improvefabrication robustnessVSAvoidwaveguide structure
Core Design Contradiction:
Ease of manufactureVSDevice complexity

Solution Approach 1:

Etch-stop layers are introduced as intermediary elements between the active and passive waveguide regions. These layers act as mediators that facilitate the fabrication process by providing clear etch depth references, making the overall process more robust despite the increased structural complexity of the buried rib configuration.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Adaptability or versatility

If the overlying waveguide includes active material for optical gain, then the device functionality is enhanced, but parasitic modes may propagate in the passive waveguide reducing coupling efficiency

Engineering Contradiction:
Improvedevice functionalityVSAvoidcoupling efficiency
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The passive waveguide is designed with breaks or terminations that extract or remove the propagating path for parasitic modes. By taking out the continuous passive waveguide structure in strategic locations, parasitic modes generated in the active waveguide region are prevented from propagating, thereby maintaining high coupling efficiency while preserving the optical gain functionality.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances coupling efficiency between semiconductor optical devices and optical fibers, reduces production costs, and improves reliability by minimizing parasitic modes and overgrowth issues, while allowing for flexible design and integration of active components.

Implementation Method 1

the overlying waveguide having at least one tapered section to support the coupling between the overlying waveguide and the passive waveguide

Methodology Applied
Scientific EffectEvanescent field coupling: Waveguide (optics)

Data Source

PatentUS9423565B2Coupled waveguide apparatus and structures therefor
Publication Date: 2016.08.23 HUAWEI TECH CO LTD
  • US9423565B2 patent drawing
  • US9423565B2 patent drawing
  • US9423565B2 patent drawing

AI summary

Planar waveguide apparatus provides a waveguide at least partially overlying a passive buried rib waveguide for coupling optical radiation there between. The overlying waveguide has at least one tapered section, the width of the taper determining the degree of coupling between the waveguides at points along the tapered section. The overlying waveguide may have an active core region. The passive buried rib may have one or more unguided sections below electrically driven regions of the active waveguide to avoid parasitic modes and/or may provide a grating for use as a filter or feedback. Variations include a branched passive waveguide for coupling to two or more overlying waveguides and two or more aligned and active overlying waveguides coupling to one passive waveguide, there being a break in a shared core region of the active waveguides to provide electrical isolation between them.