Tapered Stripe Semiconductor Laser for COD and SHB Reduction
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Solution Overview
Problem
Conventional high-power nitride-based semiconductor lasers face challenges with catastrophic optical damage (COD) and spatial hole burning (SHB), leading to reduced light output and efficiency, particularly due to the difficulty in employing an end-face window structure and the resulting non-uniform carrier concentration and light distribution.
Innovation Solution
A semiconductor light-emitting element with a ridge-shaped waveguide structure featuring a tapered stripe design, where the front end face has a wider width than the rear end face, and a specific reflectance coating configuration to improve light extraction efficiency and reduce SHB, allowing guidance of high-order transverse modes and maintaining uniform carrier concentration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If a nitride-based semiconductor laser is used for high-power operation, then light output power can be increased, but catastrophic optical damage (COD) occurs at the resonator end face
Solution Approach 1:
The patent applies local quality by creating a tapered stripe structure where the waveguide width varies along the resonator length. The front end face has a wider width to reduce light density and prevent COD, while the rear end face maintains a narrower width for effective light extraction. This non-uniform width distribution optimizes different regions for different functions: the front region for damage prevention and the rear region for light output efficiency.
2Reliability
If an end-face window structure is employed to prevent COD, then reliability improves, but spatial hole burning (SHB) increases due to non-uniform carrier concentration
Solution Approach 1:
The patent employs asymmetry by designing a tapered stripe structure with different widths at the front and rear end faces. The asymmetric width distribution creates a gradual transition in the optical field and carrier concentration profile, which reduces SHB effects while maintaining the protective function against COD. The asymmetric structure allows for more uniform carrier distribution compared to a symmetric end-face window design.
3Reliability
If the front end face width is increased to reduce light density, then COD is prevented, but light extraction efficiency decreases
Solution Approach 1:
The patent applies dynamics by implementing a tapered stripe structure where the waveguide width changes gradually along the resonator length. This dynamic width variation allows the optical mode to adapt continuously from the narrow rear end to the wider front end, optimizing both light extraction at the rear and light density reduction at the front. The gradual transition prevents abrupt changes in light distribution that would otherwise cause energy loss.
4Productivity
If a tapered stripe structure is used to reduce SHB, then operating current decreases, but manufacturing complexity increases
Solution Approach 1:
The patent applies parameter changes by systematically varying the waveguide width parameter along the resonator length to create a tapered profile. This parameter variation optimizes the balance between reducing SHB and maintaining manufacturability. The specific taper ratio and width values are carefully selected to achieve low operating current while using standard fabrication processes that can handle the tapered geometry.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances temperature characteristics and power conversion efficiency, enabling high-power operation with reduced operating current and increased reliability by minimizing COD and SHB, thus achieving stable light output even at high temperatures.
Implementation Method 1
a front resonator end face from which laser light is extracted is coated with a dielectric film having a low reflectance (AR) of equal to or lower than about 10%
Implementation Method 2
a rear resonator end face is coated with a dielectric film having a high reflectance (HR) of equal to or higher than about 90%
Implementation Method 3
semiconductor lasers using a nitride-based material are capable of emitting light such as visible light and ultraviolet light
Data Source
AI summary
In a semiconductor light-emitting element, a first cladding layer in a first conductive type, a quantum well active layer, and a second cladding layer in a second conductive type are stacked on a semiconductor substrate in this order. A ridge-shaped stripe formed at the second cladding layer forms a waveguide. Rf<Rr and Wf>Wr are satisfied, where the width of the ridge-shaped stripe at a front end face from which laser light is output is represented by Wf, the width of the ridge-shaped stripe at a rear end face is represented by Wr, the reflectance of the front end face is represented by Rf, and the reflectance of the rear end face is represented by Rr. Light in a fundamental transverse mode, a first high-order transverse mode, a second high-order transverse mode, and a third high-order transverse mode is guided in the waveguide.


