Tapered Window Structure for LSP Light Source Seal Protection

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Solution Overview

Problem

High-power windows in laser-sustained plasma (LSP) light sources face a trade-off between practical size and radiative heat load, leading to seal degradation due to direct irradiation by broadband light, which limits their performance.

Innovation Solution

A tapered window configuration is introduced to deflect a portion of the broadband light away from the seals, protecting the gas containment structure by using a tapered surface to redirect the light impinging on the peripheral portion of the window, thereby reducing thermal loads on the seals.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the window is placed in close proximity to the plasma light source, then the light transmission efficiency is improved, but the seal regions experience high thermal loads leading to degradation

Engineering Contradiction:
Improvelight transmission efficiencyVSAvoidseal durability
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The window is divided into two functional sections: a first section with a first surface facing the plasma light source and a second section with a second surface opposite the first surface. This segmentation allows each section to handle different aspects of light transmission and thermal management, reducing the thermal load on seal regions while maintaining light transmission efficiency.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces a dimensional approach by creating a multi-section window structure that extends beyond a simple planar configuration. The first and second sections are arranged in a spatial configuration that deflects broadband light away from seal regions, adding a dimensional solution to the thermal management problem.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Area of stationary object

If the window size is increased, then the light collection area is improved, but the radiative heat load on the window and seals increases

Engineering Contradiction:
Improvewindow areaVSAvoidradiative heat load
Core Design Contradiction:
Area of stationary objectVSTemperature

Solution Approach 1:

The window is segmented into a first section and a second section, where the first section can be positioned to capture light while the second section is configured to manage thermal loads. This segmentation allows the window to be larger in area without proportionally increasing the heat load on any single region, particularly the seal areas.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different sections of the window are designed with different functional qualities: the first section is optimized for light collection while the second section is optimized for thermal management. This local differentiation allows the window to have large overall area while specific regions handle the thermal burden, reducing seal degradation.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The tapered window effectively protects the seals from radiative heat, enhancing the durability and performance of the LSP broadband light source by preventing direct irradiation and maintaining the structural integrity of the window.

Implementation Method 1

a tapered surface configured to deflect a portion of light impinging on a peripheral portion of the window away from the aperture of the gas containment structure

Methodology Applied
Scientific EffectLight deflection: Reflection

Implementation Method 2

near-Infrared (NIR) Continuous Wave (CW) pump laser light is focused to a gas-containing vessel, where a plasma is ignited and sustained by absorption of the pump laser radiation

Methodology Applied
Scientific EffectLaser radiation absorption: Absorption (EM radiation)

Implementation Method 3

the plasma generates broadband light

Methodology Applied
Scientific EffectPlasma radiation: Luminescence

Data Source

PatentUS12198921B2Laser-sustained plasma light source with tapered window
Publication Date: 2025.01.14 KLA CORP
  • US12198921B2 patent drawing
  • US12198921B2 patent drawing
  • US12198921B2 patent drawing

AI summary

A LSP broadband light source is disclosed. The light source may include a gas containment structure for containing a gas. The light source may include a laser pump source configured to generate an optical pump to sustain a plasma within the gas containment structure for generation of broadband light. The light source may include a tapered window configured to transmit broadband light through an aperture within a wall of the gas containment structure, the tapered window including a tapered section including a tapered surface, wherein the tapered surface is configured to deflect light impinging on a peripheral portion of the tapered window away from a portion of the gas containment structure to protect the portion of the gas containment structure.