Target Material Refinement for EUV Light Generation
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Solution Overview
Problem
In the production of semiconductor devices with feature sizes below 32 nm, the separation of oxidants from target materials during EUV light generation leads to nozzle clogging and directional changes in the output, due to the solubility of oxygen atoms in the target materials, which are not fully dissolved at lower temperatures used in the generation process.
Innovation Solution
A target material refinement device with a refinement tank, heating section, and oxygen-atom removing section is used to decrease oxygen atoms in the target material, preventing their separation and accumulation, which includes a configuration with a nozzle that outputs the refined material into a chamber for EUV light generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the target material is used at lower temperatures for EUV light generation, then the operational cost and complexity are reduced, but oxygen atoms do not fully dissolve leading to separation and accumulation of oxidants
Solution Approach 1:
The patent applies preliminary action by performing oxygen removal from the target material before it is used in EUV light generation. The oxygen-atom removing section eliminates oxygen atoms in advance, preventing their subsequent separation and accumulation during operation at lower temperatures, thus resolving the contradiction between operational simplicity and compositional stability.
2Stability of the object's composition
If the target material is heated to high temperatures to fully dissolve oxygen atoms, then compositional stability is improved, but oxidants separate and accumulate causing nozzle clogging
Solution Approach 1:
The patent converts the harmful effect of oxygen atoms (which cause separation and nozzle clogging) into a beneficial process by actively removing them through the oxygen-atom removing section. This transforms the potential harm of oxygen presence into a benefit of pre-elimination, preventing all subsequent harmful effects while maintaining operational simplicity.
3Object-generated harmful factors
If oxygen atoms are removed from the target material, then harmful effects are reduced, but additional processing steps are required
Solution Approach 1:
The patent merges the oxygen removal process with the target material supply system by integrating the oxygen-atom removing section into the existing target material handling apparatus. This combination allows oxygen elimination to be performed as part of the normal material preparation流程, adding minimal complexity while effectively preventing oxidant separation and nozzle clogging.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively suppresses the separation of oxidants, preventing nozzle clogging and maintaining the output direction stability by reducing oxygen atoms in the target material, ensuring consistent EUV light generation.
Implementation Method 1
a heating section configured to heat the target material in the sealed space
Implementation Method 2
an oxygen-atom removing section configured to remove oxygen atoms present in the target material
Data Source
AI summary
A target material refinement device may include a refinement tank to accommodate a target material, a heating section to heat the interior of the refinement tank, and an oxygen-atom removing section to remove oxygen atoms present in the target material.