Target Structure with Peripheral Conductive Member for X-ray Apparatus
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Solution Overview
Problem
Existing target structures face challenges in heat diffusion to the substrate and unnecessary X-ray generation due to the interposition of an antistatic layer and conductive coatings, which degrade X-ray source performance and restrict voltage supply line arrangements.
Innovation Solution
A target structure with an insulating substrate and a target on one surface, where a first conductive member for voltage supply is placed in the peripheral area, excluding the central area, to facilitate heat diffusion and minimize unnecessary X-ray generation, while a second conductive member stabilizes the electrical connection and adhesiveness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If an antistatic layer is interposed between the target and substrate, then charge-up is prevented, but heat diffusion from target to substrate is blocked
Solution Approach 1:
The invention removes the antistatic layer from between the target and substrate, extracting the harmful element that blocked heat diffusion. Instead, a conductive member is provided separately on the substrate surface to prevent charge-up, allowing direct thermal contact between target and substrate while maintaining electrical charge control.
Solution Approach 2:
The invention separates the charge prevention function from the thermal conduction path. The conductive member is positioned on the substrate surface rather than between target and substrate, segmenting the electrical function from the thermal pathway and allowing both requirements to be satisfied independently.
2Reliability
If a conductive-material coating is formed on the electron beam irradiated area, then charge-up is prevented, but unnecessary X-ray is generated degrading source performance
Solution Approach 1:
The conductive member is provided only on the peripheral area of the substrate that does not overlap with the target, creating local differentiation. The central area containing the target maintains its insulating properties to prevent X-ray generation, while the peripheral area provides charge prevention functionality.
3Object-generated harmful factors
If a conductive lead is narrowly formed to apply voltage to buried target, then unnecessary X-ray is suppressed, but process restrictions and arrangement constraints are increased
Solution Approach 1:
The conductive member is extended in the planar direction on the substrate surface rather than being confined to a narrow vertical lead structure. This dimensional expansion allows flexible routing and connection to the target without generating unnecessary X-rays, improving manufacturability while maintaining radiation safety.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively suppresses unnecessary X-ray emission, allows for flexible voltage supply line arrangements, and ensures stable X-ray output and linearity by preventing charge-up and enhancing heat transfer.
Implementation Method 1
a target structure which generates an X-ray in response to irradiation of an electron beam
Implementation Method 2
a first conductive member for supplying a voltage to the target is provided
Implementation Method 3
facilitate the diffusion of the heat generated in the target to the substrate
Data Source
AI summary
In a target structure according to the present invention, a target is provided on a central area of an insulating substrate, and a first conductive member for supplying a voltage to the target is provided on a peripheral area of the insulating substrate which is exclusive of an area overlapping the target and is not covered by the target, so that the first conductive member is in contact with and electrically connected to the peripheral portion of the target. Consequently, it is possible to easily form a voltage supply line to the target without preventing diffusion of a heat generated in the target to the substrate and while suppressing emission of an unnecessary X-ray.