Target Processing Unit Modular Conduit Decoupling
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Solution Overview
Problem
In charged particle beam processing devices, implementing a modular design is challenging due to complexities in beam alignment, mechanical coupling, and vibration issues, which affect maintenance efficiency and positioning accuracy in lithography systems.
Innovation Solution
A target processing unit with a vacuum chamber and projection column, featuring a conduit arrangement that decouples vibrations and allows for modular construction and maintenance, including an intermediate conduit assembly with access ports and connector panels for efficient connection and disconnection of conduits, facilitating easy replacement and alignment of modules.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If modular design is implemented in charged particle beam processing devices, then maintenance efficiency is improved, but beam alignment accuracy deteriorates
Solution Approach 1:
The projection column is divided into multiple modular projection modules that can be independently replaced. Each module contains specific beam manipulation components (lenses, deflectors, blankers) grouped by function, allowing selective maintenance without disassembling the entire system. The carrier frame provides standardized mounting interfaces for these modules.
Solution Approach 2:
Alignment markers are introduced as intermediary reference elements between modules. These markers provide fixed reference points that enable precise relative positioning of modular components during reassembly, ensuring beam alignment accuracy is restored after module replacement. The markers act as mediators that bridge the gap between independent modules.
2Ease of repair
If more modules are created for easier maintenance, then maintenance efficiency is improved, but beam alignment accuracy deteriorates
Solution Approach 1:
The system is segmented into projection modules at an optimal granularity that balances maintainability with alignment preservation. Modules are grouped by functional similarity (e.g., all lens elements in one module, deflectors in another) to minimize the number of interfaces while enabling independent maintenance of specific functional groups.
Solution Approach 2:
Alignment markers are pre-installed on the carrier frame and modules before assembly. This preliminary positioning reference system is established in advance, allowing quick and accurate alignment during module reassembly without requiring complex real-time adjustment procedures.
3Ease of manufacture
If modular construction is implemented, then ease of manufacture is improved, but device complexity increases
Solution Approach 1:
The projection column is segmented into standardized modules with uniform mounting interfaces on the carrier frame. This segmentation creates repeatable assembly patterns that simplify manufacturing and installation procedures, despite the increased number of discrete components. Standardized interfaces reduce the complexity of mechanical coupling.
Solution Approach 2:
The carrier frame is designed as a universal platform that can accommodate different types of projection modules through standardized interfaces. This multi-functional design allows the same carrier frame structure to support various module configurations, reducing overall system complexity despite modular construction.
Data Source
AI summary
The invention relates to a target processing unit (10) comprising a vacuum chamber (30) for accommodating a target to be processed, a projection column (46) within the vacuum chamber for generating a beam and projecting the beam towards the target, and a first conduit arrangement (26,36,37,60) for connecting the projection column to external equipment (22). The vacuum chamber can comprise a positioning system (114) for supporting the target, and a second conduit arrangement (110) distinct from the first conduit arrangement for connecting the positioning system to external equipment, wherein the positioning system is moveably arranged with respect to the projection column, and wherein the positioning system and the projection column occupy spatially distinct portions of the vacuum chamber. The first conduit arrangement extends through an upper side of the vacuum chamber, and the second conduit arrangement extends through a lower side of the vacuum chamber.