Multi-Container Target Supply for EUV Pressure Stability
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Solution Overview
Problem
In extreme ultraviolet (EUV) light generation systems for semiconductor manufacturing, the rapid miniaturization of transfer patterns poses challenges in maintaining consistent pressure within the EUV light generation apparatus, leading to fluctuations in target substance speed and position during pulsed laser irradiation, affecting the quality of EUV light.
Innovation Solution
A target supply device with a configuration that includes multiple containers and valves, along with pressurized gas supply pipes, is used to manage pressure fluctuations by equalizing the pressure in the load lock chamber and pressure tank, ensuring stable target substance delivery and irradiation conditions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single container is used to supply target substance, then the device structure is simple, but pressure fluctuations occur during target substance supply affecting speed and position stability
Solution Approach 1:
The target substance supply system is divided into multiple separate containers (first container, second container, third container) with controlled connections. Each container can be independently pressurized and managed, allowing the system to maintain stable pressure in the active supply container while enabling replacement or replenishment of others without disrupting the EUV generation process.
Solution Approach 2:
Target substance is pre-loaded into multiple containers and pressurized in advance. The first container supplies target substance to the second container, which in turn supplies to the third container, establishing a pre-prepared supply chain that ensures continuous stable pressure supply without interruption during EUV light generation.
2Reliability
If multiple containers with pressurized gas supply are used, then pressure stability and target substance speed/position control are improved, but device complexity increases
Solution Approach 1:
Multiple container systems are merged into a coordinated supply network where the first container, second container, and third container work together through controlled valve operations. The pressurized gas supply systems are integrated to provide unified pressure control across all containers, achieving stable target substance delivery while sharing the complexity burden across modular components.
Solution Approach 2:
The second container serves as an intermediary between the first container (source) and third container (delivery point). It receives pressurized target substance from the first container and transfers it to the third container, allowing pressure equalization and stable supply to be maintained while enabling independent management of each container segment.
3Productivity
If target substance supply is continuous, then productivity is maintained, but pressure fluctuations affect EUV light quality
Solution Approach 1:
The system implements periodic valve operations to control target substance flow between containers. Valves are opened and closed in a predetermined sequence to transfer target substance from the first container to the second container, and from the second to the third container, creating a rhythmic, controlled supply pattern that maintains continuous productivity while ensuring stable pressure conditions during each transfer cycle.
Solution Approach 2:
The valve control system dynamically adjusts the supply process by opening and closing valves at specific times based on pressure conditions and supply requirements. This dynamic control allows the system to maintain continuous target substance supply to the EUV generation chamber while preventing pressure fluctuations that would degrade EUV light quality.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution stabilizes the speed and position of the target substance during irradiation, resulting in improved quality and consistency of EUV light generation, reducing downtime and maintaining precise control over the EUV light generation process.
Implementation Method 1
pressurized gas supply pipes, is used to manage pressure fluctuations by equalizing the pressure in the load lock chamber and pressure tank
Implementation Method 2
a laser produced plasma (LPP) type apparatus using plasma generated by irradiating a target substance with pulsed laser light
Implementation Method 3
plasma generated by irradiating a target substance with pulsed laser light
Data Source
AI summary
A target supply device may include a first container configured to contain a target substance, a second container configured to contain the target substance supplied from the first container, a first valve disposed between the first container and the second container, a first pipe connected to the second container and configured to supply pressurized gas to the second container, a third container configured to contain the target substance supplied from the second container, a second valve disposed between the second container and the third container, a second pipe connected to the third container and configured to supply pressurized gas to the third container, and a nozzle configured to output the target substance supplied from the third container.