Target Supply Device Nozzle Clogging Prevention
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Solution Overview
Problem
In EUV light generation systems, the formation of tin oxide within the target supply device's nozzle during maintenance or exposure can lead to nozzle clogging and unintended target output directions due to the higher melting point of tin oxide compared to the target material, causing operational issues.
Innovation Solution
A control method for the target supply device that involves melting and then hardening the target material within the target generator, forming an adhering area that covers the nozzle hole, and controlling pressure and temperature to prevent tin oxide formation inside the nozzle, ensuring proper target output.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the target material is heated to melt and push out from the nozzle hole, then the target material can be supplied to the plasma generation region, but tin oxide may form inside the nozzle due to oxidation, causing clogging
Solution Approach 1:
The patent applies an inert atmosphere by introducing a protective gas (such as nitrogen or rare gas) into the target generator chamber to replace air. This prevents oxidation of the molten target material, thereby avoiding tin oxide formation and clogging in the nozzle while maintaining continuous target material supply to the plasma generation region
2Productivity
If the target material is pressurized to push out from the nozzle, then target output is achieved, but the adhering area may not cover the entire nozzle hole, causing unintended target output directions
Solution Approach 1:
The patent employs parameter changes by carefully controlling the pressure applied to the target material and the duration of pressurization. By adjusting these parameters, the target material forms an adhering area that completely covers the nozzle hole opening, ensuring that molten target material is directed only through the intended nozzle hole and preventing unintended output directions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents nozzle clogging and ensures accurate target output by maintaining the target material in a state that prevents tin oxide formation, thereby maintaining system efficiency and reliability.
Implementation Method 1
a heating unit configured to heat the target material within the target generator
Implementation Method 2
melting the target material by heating the target material within the target generator using the heating unit
Implementation Method 3
pushing out the target material in the target generator from a nozzle hole in the nozzle by pressurizing the interior of the target generator using the pressure control unit
Implementation Method 4
maintaining the target material in a state that prevents tin oxide formation
Data Source
AI summary
A control method for a target supply device includes melting a target material by heating the target material within a target generator using a heating unit, pushing out the target material from a nozzle hole in a nozzle by pressurizing the interior of the target generator using a pressure control unit, determining whether or not the size of an adhering area of the target material that forms when the target material is pushed out from the nozzle hole and adheres to a leading end of the nozzle has reached a set size that covers the entire nozzle hole, stopping the pressurization of the interior of the target generator by the pressure control unit when the size of the adhering area has reached the set size, and hardening the target material in the target generator and the adhering area by stopping the heating of the target material by the heating unit.