Deposition Target Termination Unit With Magnetic Field Shielding
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Solution Overview
Problem
Existing termination units in deposition systems face challenges in efficiently transferring power to targets while minimizing energy losses and mechanical interference due to varying magnetic fields generated by non-contributing currents.
Innovation Solution
The introduction of a shielding element, such as a shielding winding, configured to mitigate the effects of non-contributing magnetic fields on electrical steel components within the termination unit, allowing for efficient power transfer and reduced energy losses.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If a current transfer means is placed neighboring electrical steel components to transfer power to the target, then power transfer capability is improved, but energy losses increase due to non-contributing magnetic fields affecting the electrical steel
Solution Approach 1:
A shielding element is introduced as an intermediary component between the current transfer means and the electrical steel. This shielding element creates a counteracting magnetic field that cancels the non-contributing magnetic field, thereby protecting the electrical steel from energy losses while allowing the current transfer means to maintain its power transfer function
Solution Approach 2:
The non-contributing magnetic field, which originally caused harmful energy losses in the electrical steel, is converted into a beneficial effect by using it to induce a counteracting field in the shielding element. This transforms the harmful magnetic interference into a useful mechanism for protecting the electrical steel components
2Device complexity
If the termination unit is designed to be compact for efficient operation, then device complexity is reduced, but heat dissipation becomes more difficult due to proximity of components
Solution Approach 1:
The shielding element is nested within the existing termination unit structure, positioned to surround or be adjacent to the electrical steel components. This nested configuration provides magnetic shielding and heat management functionality without significantly increasing the overall device volume or complexity
3Manufacturing precision
If the termination unit rotates the target during deposition, then deposition uniformity is improved, but mechanical interference from magnetic fields increases
Solution Approach 1:
The shielding element acts as a mediator that isolates the rotating target mechanism from harmful magnetic field interference. By creating a counteracting field, the shielding element protects the rotational mechanism from magnetic disturbances, enabling smooth and uniform target rotation during deposition
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables a more compact and efficient termination unit that can rotate targets while reducing energy losses and maintaining operational efficiency by counteracting non-contributing magnetic fields, thus minimizing heating and torque losses.
Implementation Method 1
an effect of the neighboring current on the component comprising electrical steel, which is not contributing to the function of the device, is mitigated by a current through the shielding element resulting in a counteracting field in the shielding element
Data Source
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AI summary
A termination unit (300) for a deposition system, comprising a device (100) for effecting a function, the device comprising at least one component (110) comprising electrical steel, and at least one shielding element (120) which is electrically conductive. The shielding element is configured such that: an effect of a neighboring current on the component (120) comprising electrical steel, which is not contributing to the function of the device, is mitigated, wherein this neighboring current has a first topology; and such that an effect of at least one neighboring current having a different topology than the first topology is not significantly mitigated. The device moreover comprises a current transfer means (140) neighboring the at least one component (110) comprising electrical steel, and adapted for guiding a current according to the first topology and for transferring power to a target when it is mounted on the termination unit.