TCB Bond Head Compensation for Thermal Contact Misalignment

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Solution Overview

Problem

Thermal expansion during thermocompression bonding (TCB) processes leads to misalignment issues between IC device contacts and substrate contacts due to disproportionate expansion and thermal drift, especially when the substrate is larger than the bond head device, causing misalignment and potential solder bridging.

Innovation Solution

Implementing a dynamic thermal displacement compensation system using position detectors to monitor substrate edges and corners, tracking displacement vectors in both X and Y directions, and adjusting the bond head position in real-time to compensate for thermal expansion and contraction, allowing for tighter pitch bonding.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If thermocompression bonding is performed at high temperature to achieve strong bonding, then bonding strength is improved, but thermal expansion causes misalignment between contacts

Engineering Contradiction:
Improvebonding strengthVSAvoidcontact alignment precision
Core Design Contradiction:
StrengthVSManufacturing precision

Solution Approach 1:

The system performs preliminary actions by detecting substrate edge positions before bonding occurs and calculating expected thermal displacement vectors. The bond head position is pre-adjusted based on these calculations, so when thermal expansion occurs during heating, the contacts remain properly aligned. This preliminary detection and calculation eliminates the misalignment problem that would otherwise occur during high-temperature bonding.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system implements feedback by using position detectors to continuously monitor substrate edge positions during the bonding process. The detected positions are fed back to the control circuit, which calculates real-time displacement vectors and adjusts the bond head position accordingly. This closed-loop feedback ensures that contact alignment is maintained throughout the thermal bonding process, resolving the contradiction between high temperature bonding and alignment precision.

Inventive Principle:
Principle #23Feedback

2Reliability

If the substrate is heated to bonding temperature, then bonding capability is improved, but thermal drift causes displacement between device and substrate contacts

Engineering Contradiction:
Improvebonding reliabilityVSAvoidcontact position accuracy
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The system replaces the traditional mechanical alignment approach with an optical/electromagnetic detection system. Position detectors using optical or electromagnetic fields monitor substrate edge positions and calculate thermal displacement vectors. The control circuit processes this information and electronically adjusts the bond head position, substituting mechanical trial-and-error alignment with precise field-based detection and electronic control, thereby maintaining contact accuracy during thermal drift.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The system changes the parameter being controlled from fixed mechanical position to dynamically adjustable position based on thermal displacement vectors. The control circuit calculates the displacement vector components (dx, dy) from detected substrate edge positions and adjusts the bond head position parameters accordingly. This parameter change allows the system to adapt to thermal expansion and maintain contact alignment throughout the bonding process.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Reduces misalignment during TCB by dynamically adjusting the bond head position based on monitored substrate displacement, enabling tighter pitch bonding and minimizing solder bridging, particularly in composite die bonding processes.

Implementation Method 1

substrate expansion during bonding can result in a misalignment between an IC devices contacts and those from the substrate

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Implementation Method 2

tracking displacement vectors in both X and Y directions, and adjusting the bond head position in real-time to compensate for thermal expansion and contraction

Methodology Applied
Scientific EffectThermal contraction: Thermal Contraction

Implementation Method 3

bring the associated metal contact surfaces into intimate atomic contact with each other and enable diffusion processes to merge them together

Methodology Applied
Scientific EffectDiffusion: Diffusion

Data Source

PatentEP4672313A1Dynamic substrate thermal displacement compensation
Publication Date: 2025.12.31 INTEL CORP
  • EP4672313A1 patent drawingFigure 1A~1D
  • EP4672313A1 patent drawingFigure 2A
  • EP4672313A1 patent drawingFigure 2B~4B

AI summary

In some embodiments, methods and apparatuses for performing thermal compression bonding and compensating for thermal displacement are provided.