Thermal Conductivity Gauge Chamber Wall Temperature Control

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Solution Overview

Problem

Conventional thermal conductivity gauges (TCGs) face accuracy and reproducibility issues due to ambient temperature variations, which are not adequately compensated for, especially in applications requiring wide temperature range operation, and are affected by self-heating effects even under stable room temperatures.

Innovation Solution

Implementing precise temperature control of the sensor chamber wall above ambient temperature, maintaining a controlled temperature difference between the sensor resistor and the chamber wall, which reduces the influence of room temperature on pressure readings and optimizes sensor and wall temperatures for process conditions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the sensor wire temperature is kept constant in conventional TCGs, then the heating power measurement can be performed, but the chamber wall temperature varies with ambient temperature causing measurement inaccuracy

Engineering Contradiction:
Improvepressure measurement accuracyVSAvoidchamber wall temperature stability
Core Design Contradiction:
Measurement precisionVSTemperature

Solution Approach 1:

The patent changes the temperature parameter of the chamber wall from ambient-temperature-dependent to actively controlled at an elevated temperature. By introducing a heater that maintains the chamber wall at a controlled temperature above ambient, the system eliminates the variability caused by ambient temperature changes, thereby improving pressure measurement accuracy.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent implements a feedback control system where the chamber wall temperature is monitored and adjusted by a heater to maintain a controlled temperature. This feedback mechanism ensures that the chamber wall temperature remains stable despite ambient temperature variations, resolving the contradiction between measurement precision and temperature stability.

Inventive Principle:
Principle #23Feedback

2Measurement precision

If ambient temperature compensation schemes are implemented in conventional TCGs, then measurement accuracy can be maintained, but device complexity and cost increase

Engineering Contradiction:
Improvepressure measurement accuracyVSAvoidcompensation scheme complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent extracts the temperature control function from the sensor wire and applies it to the chamber wall instead. By heating and controlling the chamber wall temperature separately from the sensor wire, the system simplifies the overall compensation mechanism while maintaining or improving measurement accuracy, avoiding complex algorithms and calibration procedures.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent introduces the chamber wall as an intermediary element between the ambient environment and the sensor wire. By controlling the chamber wall temperature, it mediates the thermal environment of the sensor wire, eliminating the need for complex ambient temperature compensation schemes while maintaining measurement accuracy.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Measurement precision

If the sensor wire temperature is adjusted to maintain constant temperature difference, then measurement accuracy can be maintained, but additional compensation wire schemes are required increasing device complexity

Engineering Contradiction:
Improvepressure measurement accuracyVSAvoidcompensation wire scheme complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent extracts the temperature control function from the sensor wire and applies it to the chamber wall instead. By heating and controlling the chamber wall temperature separately, the system maintains a stable temperature difference without requiring additional compensation wires or complex sensor configurations, thereby reducing device complexity.

Inventive Principle:
Principle #2Taking out (Extraction)

4Adaptability or versatility

If conventional TCGs operate over wide temperature ranges, then versatility is improved, but measurement accuracy deteriorates due to temperature coefficient effects

Engineering Contradiction:
Improvetemperature range operationVSAvoidpressure measurement accuracy
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The patent changes the chamber wall temperature from a passive ambient-temperature parameter to an actively controlled parameter maintained above ambient. This allows the system to operate accurately over wide ambient temperature ranges while maintaining measurement precision, as the controlled chamber wall temperature compensates for ambient variations.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the accuracy, reproducibility, and stability of pressure measurements by minimizing ambient temperature impacts, eliminating the need for complex compensation schemes and achieving high accuracy over a broader temperature range while reducing self-heating effects and maintenance costs.

Implementation Method 1

A heater heats the chamber wall

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 2

Thermal conductivity gauges (TCGs) measure pressure based on the relationship between temperature of a heated sensor resistor and the amount of heating power applied to the sensor resistor

Methodology Applied
Scientific EffectThermal conductivity: Conduction (thermal)

Data Source

PatentUS11808643B2Thermal conductivity pressure gauge with heated chamber wall
Publication Date: 2023.11.07 MKS INSTR INC
  • US11808643B2 patent drawing
  • US11808643B2 patent drawing
  • US11808643B2 patent drawing

AI summary

A Process Critical Thermal Conductivity Gauge (PCTCG) instrument relies on gauge chamber wall above-ambient-temperature-control (AATC) to provide improved accuracy and thermal stability with reduced and linearized temperature coefficients. A sensor resistor is exposed to gas pressure in a gauge chamber. AATC is provided by control of a heater that heats a chamber wall to control temperature difference between the sensor resistor and chamber wall. An example application of this technology is to end-point detection in lyophilization where the TCG is used to track partial pressures of water in binary gas mixtures.