TDI Sensor Charge Speed Control for X-ray Inspection Focus

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Solution Overview

Problem

Conventional X-ray transmission inspection apparatuses experience image blur and erroneous detection due to variations in the vertical position of the sample, leading to over-detection of foreign matter.

Innovation Solution

An X-ray transmission inspection apparatus with a time delay integration sensor (TDI sensor) controlled by a distance sensor to adjust the charge transfer speed in real time, ensuring precise focus and preventing image blur, utilizing a laser distance sensor to measure variations in the sample's position.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If a constant charge transfer speed is used in the TDI sensor, then the inspection process is simple, but image blur occurs when sample position varies

Engineering Contradiction:
Improvesimplicity of inspection processVSAvoidimage focus accuracy
Core Design Contradiction:
Ease of operationVSManufacturing precision

Solution Approach 1:

The patent applies the dynamics principle by making the charge transfer speed of the TDI sensor variable rather than constant. The control unit dynamically adjusts the charge transfer speed based on the actual distance between the X-ray source and sample, allowing the system to adapt to position variations and maintain image focus accuracy without complex mechanical adjustments.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent implements feedback by using the distance sensor to continuously monitor the position between the X-ray source and sample, then feeding this information back to the control unit which adjusts the charge transfer speed accordingly. This closed-loop feedback mechanism ensures that image quality is maintained despite variations in sample positioning.

Inventive Principle:
Principle #23Feedback

2Manufacturing precision

If the charge transfer speed is adjusted in real time based on distance variations, then image focus accuracy is maintained, but the device complexity increases

Engineering Contradiction:
Improveimage focus accuracyVSAvoidcomplexity of control system
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent replaces mechanical adjustment mechanisms with an electronic control system. Instead of physically adjusting the TDI sensor or X-ray source position to maintain focus, the system uses electronic adjustment of the charge transfer speed based on distance measurements, significantly reducing mechanical complexity while maintaining precision.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the operational parameter of the TDI sensor (charge transfer speed) in response to distance variations. By adjusting this electrical parameter rather than mechanical positions, the system maintains image focus accuracy with minimal increase in overall device complexity.

Inventive Principle:
Principle #35Parameter changes

3Manufacturing precision

If a laser distance sensor is added to measure sample position, then image blur is prevented, but the device complexity increases

Engineering Contradiction:
Improveprevention of image blurVSAvoidnumber of sensor components
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The distance sensor serves multiple functions: it measures the position of the sample, provides feedback for charge transfer speed adjustment, and enables the system to compensate for position variations. This multi-functionality justifies the addition of the sensor by providing multiple benefits from a single component.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The distance sensor acts as an intermediary between the physical position variation and the electronic control system. It converts physical distance information into electrical signals that the control unit can process, enabling precise adjustment of the charge transfer speed without direct mechanical intervention.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables accurate detection of foreign matter by maintaining image focus and preventing over-detection, even with sample position variations, allowing for more detailed and precise data acquisition.

Implementation Method 1

utilizing a laser distance sensor to measure variations in the sample's position

Methodology Applied
Scientific EffectLaser reflection: Reflection

Implementation Method 2

X-ray transmission inspection is used on the sample by means of an X-ray transmission image that is obtained by irradiating a sample with X-rays

Methodology Applied
Scientific EffectX-ray transmission: X-Ray

Data Source

PatentUS10054555B2X-ray transmission inspection apparatus and inspection method using the same
Publication Date: 2018.08.21 HITACHI HIGH TECH ANALYSIS CORP
  • US10054555B2 patent drawing
  • US10054555B2 patent drawing
  • US10054555B2 patent drawing

AI summary

Disclosed are an X-ray transmission inspection apparatus and an inspection method using the same that are capable of preventing over-detection and erroneous detection of foreign matter even when variations in vertical position of the sample occur. The X-ray transmission inspection apparatus includes: an X-ray source (2) irradiating a sample with X-rays; a sample moving device (3) moving the sample S continuously to a predetermined direction while X-rays X are emitted from the X-ray source; a time delay integration sensor (TDI sensor) (4) provided opposed to the X-ray source based on the sample, and detecting the X-rays transmitted through the sample; a distance sensor (5) measuring a distance between the X-ray source and the sample; and a TDI controller (6) controlling the TDI sensor by changing a charge transfer speed of the TDI sensor (4) in real time based on variations in the distance measured by the distance sensor.