TDI Sensor Data Transfer for X-ray Inspection
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Solution Overview
Problem
Existing X-ray inspection apparatuses face challenges in real-time data transfer due to increased output data from high-performance detectors, particularly when sample width increases or pixel size decreases, leading to delays and missing signals in signal processing.
Innovation Solution
The X-ray inspection apparatus employs a TDI sensor with a computing unit that sets a determination region and transfers only data from detected rows, reducing the amount of data transferred and processing load, while allowing for real-time data transfer by excluding non-detecting rows and optimizing column settings based on sample material.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If high-performance TDI sensor with increased number of pixels or reduced pixel size is used to increase resolution and detection sensitivity, then detection precision is improved, but amount of data to be transferred increases
Solution Approach 1:
The patent divides the TDI sensor data into multiple channels corresponding to different wavelength bands. By segmenting the data according to wavelength, the system can process and transfer only the specific wavelength ranges needed for foreign substance detection, rather than transferring all pixel data from the entire sensor array.
Solution Approach 2:
The patent extracts only the necessary wavelength band data from the full TDI sensor output. The signal processing unit identifies and extracts specific wavelength ranges that are most effective for detecting foreign substances, discarding or ignoring data from wavelength bands that are not useful for the detection task, thereby reducing overall data transfer volume.
2Productivity
If inspection speed is increased or sample width is increased, then productivity is improved, but amount of data to be transferred increases
Solution Approach 1:
The patent segments the inspection process into multiple wavelength channels, allowing parallel processing of different spectral information. This segmentation enables faster processing by distributing the computational load across multiple wavelength-specific processing paths rather than handling all data sequentially.
Solution Approach 2:
The patent changes the parameter of data selection by wavelength band. Instead of transferring all pixel data regardless of content, the system dynamically selects and transfers only data within specific wavelength ranges that are relevant for foreign substance detection, reducing data volume while maintaining inspection speed.
3Measurement precision
If all data from TDI sensor is transferred to control computer for processing, then measurement precision is maintained, but signal processing delay increases
Solution Approach 1:
The patent extracts only the essential wavelength band information needed for foreign substance detection before transfer to the control computer. By removing unnecessary wavelength data at the sensor level, the system maintains detection accuracy for relevant substances while significantly reducing the time required for data transfer and processing.
Solution Approach 2:
The patent performs preliminary data filtering and wavelength selection at the sensor level before data is transferred to the control computer. This preliminary action of pre-processing and selecting only relevant wavelength bands reduces the burden on the control computer and eliminates processing delays that would occur if all raw data were transferred and then filtered.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces data transfer volume and processing load, enabling real-time data transfer and maintaining detection ability, even at higher inspection speeds or with increased resolution.
Implementation Method 1
a TDI sensor, which is mounted on an opposite side of the X-ray source with respect to the sample, and includes a plurality of columns of line sensors in the particular direction, the line sensors each including a plurality of pixels arrayed in a direction orthogonal to the particular direction so that the pixels are arranged in matrix, the TDI sensor being configured to detect the X-ray that has been transmitted through the sample with the pixels
Data Source
AI summary
Provided are an X-ray inspection apparatus and an X-ray inspection method. The X-ray inspection apparatus includes: an X-ray source; a sample moving mechanism; the TDI sensor; and a TDI computing unit. The TDI computing unit includes a data transfer unit configured to transfer, to an outside, data of accumulated charges obtained by accumulating and transferring the charges, and has a function of setting in advance, as a determination region, a plurality of columns of line sensors with which the sample is detectable, and of detecting the sample in the determination region. The data transfer unit is configured to set, as detecting rows, rows of the pixels with which the sample has been detected in the determination region and rows around the rows, and transfer, to the outside, the data of accumulated charges only for pixels in the detecting rows.