Teaching Substrate With Cameras for Robot Auto-Teaching
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Solution Overview
Problem
Current substrate-handling robot teaching processes are inefficient and require significant tool downtime, often requiring technician intervention and resulting in reduced throughput and accuracy.
Innovation Solution
An automated teaching method using a teaching substrate equipped with cameras, distance-measuring sensors, and wireless transceivers that wirelessly transmit sensor data to determine modified routes and station positions, allowing the substrate-handling robot to learn and adapt without human intervention.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional teaching processes are used for substrate-handling robots, then the robot can be trained to handle substrates, but significant tool downtime occurs and throughput is reduced
Solution Approach 1:
The patent replaces manual mechanical teaching methods with an automated optical measurement system. Cameras and distance-measuring sensors capture substrate positions and robot movements, automatically calculating teaching data without technician intervention. This substitution eliminates the downtime associated with manual teaching while maintaining high accuracy.
Solution Approach 2:
The teaching system performs self-calibration and automatic teaching data generation. The substrate itself serves as a reference object with encoded position information, allowing the system to automatically determine robot positions and movements without external intervention, thereby eliminating tool downtime.
2Reliability
If manual teaching by technicians is performed, then the robot can be trained, but human error reduces accuracy and the process is time-consuming
Solution Approach 1:
The system replaces manual technician operations with automated optical measurement and calculation. Cameras capture precise substrate positions and robot movements, while software automatically processes this data to generate teaching information, eliminating human error and reducing teaching time significantly.
Solution Approach 2:
The system creates digital copies of substrate positions and robot movements through optical imaging. Instead of manual measurement and recording, cameras capture precise positional data that is automatically processed, ensuring high accuracy without the time consumption and errors associated with manual teaching.
3Productivity
If automated teaching methods are implemented, then throughput increases and downtime is reduced, but system complexity increases
Solution Approach 1:
The teaching substrate serves multiple functions: it acts as a reference object for position measurement, a calibration standard, and a carrier for encoded position information. This multi-functionality reduces the need for separate components, managing system complexity while enabling automated high-accuracy teaching that increases throughput.
Solution Approach 2:
The teaching substrate with encoded position information serves as an intermediary between the robot and the measurement system. It provides a standardized reference that simplifies the interaction between components, managing system complexity while enabling automated teaching and improving throughput.
Data Source
AI summary
A substrate is to be loaded into an equipment front-end module of a fabrication or inspection tool. A first camera is situated on the substrate to image regions to a side of the substrate. A second camera is situated on the substrate to image regions below the substrate. One or more wireless transceivers on the substrate to transmit images captured by the first and second cameras.