TEC Dummy Die Structure for Base Die Edge Hotspot Cooling

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Solution Overview

Problem

Thermal management in microelectronic packages is challenging due to hotspots at the edges of base dies, which are not adequately cooled by low thermal conductivity mold materials, leading to performance limitations and increased costs with high thermal conductivity materials or complex cooling solutions.

Innovation Solution

Incorporation of thermoelectric cooler (TEC) dummy dies over the edges of base dies to actively cool hotspots by transferring heat from the cold side to the integrated heat spreader, using a glass substrate with alternating P-type and N-type semiconductor vias and conductive traces for efficient thermal management.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If high thermal conductivity mold material is used, then hotspot temperature is reduced, but package cost increases

Engineering Contradiction:
Improvehotspot temperatureVSAvoidpackage cost
Core Design Contradiction:
TemperatureVSEase of manufacture

Solution Approach 1:

The patent introduces TEC dummy dies as intermediary components between the base die edges and the IHS. These dummy dies act as thermal mediators that actively pump heat away from hotspot regions through thermoelectric cooling, providing an alternative heat transfer path that does not require expensive high thermal conductivity mold materials throughout the entire package structure.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent changes the thermal management approach by transforming passive thermal conduction through mold material into active thermoelectric cooling. By changing the physical state and mechanism of heat transfer (from passive conduction to active Peltier effect), the system achieves hotspot temperature reduction without requiring high thermal conductivity mold materials, thus avoiding increased package cost.

Inventive Principle:
Principle #35Parameter changes

2Temperature

If liquid cooling is implemented, then hotspot temperature is reduced, but package complexity increases

Engineering Contradiction:
Improvehotspot temperatureVSAvoidpackage complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The patent replaces complex mechanical liquid cooling systems with solid-state thermoelectric cooling devices. The TEC dummy dies use electrical energy to drive the Peltier effect, substituting mechanical pumps, channels, and fluid management systems with a simpler solid-state solution that integrates directly into the package structure without requiring additional cooling infrastructure.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The TEC dummy dies serve multiple functions: they provide thermoelectric cooling for hotspot management, maintain structural integrity of the package, and can be integrated into existing package architectures without requiring separate cooling subsystems. This multi-functionality reduces overall package complexity compared to dedicated liquid cooling systems.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Temperature

If compute die thickness is decreased, then hotspot temperature is reduced, but thermal coupling to IHS deteriorates

Engineering Contradiction:
Improvehotspot temperatureVSAvoidthermal coupling to IHS
Core Design Contradiction:
TemperatureVSReliability

Solution Approach 1:

The patent segments the thermal management function by separating hotspot cooling (at base die edges) from overall thermal coupling (through compute dies to IHS). TEC dummy dies are placed specifically at hotspot regions to provide localized cooling, while the compute dies maintain their thickness and continue to provide robust thermal coupling to the IHS, thus resolving the contradiction between localized temperature reduction and overall thermal coupling integrity.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Effectively reduces or eliminates hotspots, improving package performance while avoiding the cost and complexity of alternative cooling methods, and maintaining reliability of components like photonics dies susceptible to temperature fluctuations.

Implementation Method 1

Thermoelectric cooler (TEC) dummy dies over the edges of base dies to actively cool hotspots by transferring heat from the cold side to the integrated heat spreader

Methodology Applied
Scientific EffectPeltier effect: Peltier Effect

Data Source

PatentEP4020546B1TEC-embedded dummy die to cool the bottom die edge hotspot
Publication Date: 2025.10.08 INTEL CORP
  • EP4020546B1 patent drawingFigure 1
  • EP4020546B1 patent drawingFigure 2A
  • EP4020546B1 patent drawingFigure 2B

AI summary

Embodiments disclosed herein include thermoelectric cooling (TEC) dies for multichip packages. In an embodiment, a TEC die comprises a glass substrate and an array of N-type semiconductor vias and P-type semiconductor vias through the glass substrate. In an embodiment, conductive traces are over the glass substrate, and individual ones of the conductive traces connect an individual one of the N-type semiconductor vias to an individual one of the P-type semiconductor vias.