Telecentric Optical Surface Height Measurement Apparatus
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Solution Overview
Problem
Existing measurement apparatuses for surface height measurement require additional height measuring instruments, complicating the measurement process and increasing complexity.
Innovation Solution
A measurement apparatus that uses a telecentric optical system with a light emitting unit, lenses, and an aperture stop to project and receive light, allowing for surface height measurement by analyzing the position of reflected light on a light receiving surface, without the need for separate height measuring instruments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If additional height measuring instruments are used for surface height measurement, then measurement capability is improved, but device complexity increases
Solution Approach 1:
The optical system is designed to perform multiple functions: both imaging measurement and height measurement. The same light emitting unit, lenses, and light receiving unit are used for both capturing object images and measuring surface heights through focal plane analysis, eliminating the need for separate height measuring instruments.
Solution Approach 2:
The patent combines height measurement functionality into the existing imaging optical system by adding a transmission unit at the focal plane. This merges two measurement functions (imaging and height measurement) into a single integrated system, reducing device complexity while maintaining measurement capabilities.
2Device complexity
If multiple measurement functions are integrated into one system, then device complexity is reduced, but measurement precision may deteriorate
Solution Approach 1:
The light receiving unit is divided into multiple regions: a first light receiving region for imaging measurement and a second light receiving region (or transmission unit) for height measurement. This segmentation allows each region to be optimized for its specific function, maintaining measurement precision while integrating multiple functions.
Solution Approach 2:
The transmission unit at the focal plane acts as an intermediary element that enables height measurement without interfering with the primary imaging function. It transmits light for height measurement while the main optical path remains dedicated to imaging, preserving measurement precision for both functions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise and simple measurement of surface height by utilizing the existing optical system, reducing complexity and enhancing measurement accuracy.
Implementation Method 1
reflected light, which is generated as the irradiation light is projected to the object, reflected by the object
Implementation Method 2
a first lens that changes a divergence degree of the irradiation light emitted from the light emitting unit
Implementation Method 3
a second lens that condenses the irradiation light passing through the aperture stop unit and projects the irradiation light to the object in a first direction
Data Source
AI summary
A measurement apparatus includes:a light emitting unit that projects irradiation light to an object;a first lens that changes a divergence degree of the irradiation light;an aperture stop unit that stops down the irradiation light projected from the first lens;a second lens that condenses the irradiation light passing through the aperture stop unit and projects the irradiation light to the object in a first direction;a transmission unit that is provided in a focal plane of the second lens and transmits therethrough a part of reflected light;a first light receiving unit that includes a light receiving surface that receives the part of the reflected light transmitted through the transmission unit; anda measurement unit that measures a height of a surface of the object by using a position of the part of the reflected light on the light receiving surface.