Telescopic Manipulator Shaft for EB/PVD Coating Apparatus

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Solution Overview

Problem

Existing EB/PVD coating apparatuses for turbine blades have complex manipulator designs in the high-temperature, dust-laden process zone, leading to increased maintenance, energy consumption, and apparatus size, with seals and movable parts being particularly prone to faults.

Innovation Solution

The apparatus features telescopic segments and a manipulator with a shaft that runs through these segments, allowing the drive unit to be outside the process zone, reducing the number of components and seals within the high-temperature area, and using anti-twist devices and seals in intermediate regions to minimize wear and facilitate maintenance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If seals and movable parts are provided in the treatment chamber to enable manipulator movement, then the workpiece can be moved and rotated for coating, but the reliability decreases due to increased maintenance requirements and component failures in the high-temperature, dust-laden environment

Engineering Contradiction:
Improveworkpiece movement and rotation capabilityVSAvoidcomponent reliability in process zone
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The drive unit and motor are extracted from the process zone and relocated to the introducing chamber. The manipulator shaft extends through the chamber wall into the process zone, allowing the workpiece to be moved and rotated without placing the drive mechanism in the harsh high-temperature, dust-laden environment. This extraction eliminates the seals and movable parts that would otherwise be required within the treatment chamber.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The manipulator shaft acts as an intermediary element that transmits rotational motion from the drive unit in the introducing chamber to the workpiece holder in the process zone. This intermediary allows the workpiece to be rotated for uniform coating while keeping the drive mechanism away from the harmful process zone environment.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Device complexity

If the manipulator drive unit is placed inside the vacuum region to enable direct control, then the movement control is simplified, but the apparatus size and energy consumption increase due to the need for larger vacuum chambers

Engineering Contradiction:
Improvecontrol mechanism simplicityVSAvoidvacuum chamber size
Core Design Contradiction:
Device complexityVSVolume of stationary object

Solution Approach 1:

The apparatus is segmented into distinct functional zones: the introducing chamber containing the drive unit and motor, and the process zone containing the workpiece holder. The manipulator shaft serves as a connection between these segments, allowing independent optimization of each zone. This segmentation enables the vacuum chamber to be sized according to the actual coating process requirements rather than accommodating the entire drive mechanism within the vacuum region.

Inventive Principle:
Principle #1Segmentation

3Reliability

If multiple seals and movable components are provided in the process zone to ensure vacuum integrity, then the vacuum maintenance is improved, but the maintenance outlay and energy consumption increase due to the harsh environment causing rapid wear

Engineering Contradiction:
Improvevacuum integrity maintenanceVSAvoidmaintenance outlay and energy consumption
Core Design Contradiction:
ReliabilityVSEase of repair

Solution Approach 1:

All seals and movable components that would normally be required within the process zone are extracted and relocated to the introducing chamber. The manipulator shaft provides a sealless connection across the chamber wall, eliminating the need for maintenance-prone seals in the harsh high-temperature, dust-laden process zone environment.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration reduces maintenance outlay, energy consumption, and apparatus size by minimizing components in the high-temperature and dust-laden region, while maintaining efficient coating capabilities and extending the service life of the apparatus.

Implementation Method 1

The method is preferably a physical vapour deposition method (PVD), in particular an electron beam/physical vapour deposition method (EB/PVD)

Methodology Applied
Scientific EffectPhysical vapour deposition: Physical Vapour Deposition

Implementation Method 2

an electron beam/physical vapour deposition method (EB/PVD)

Methodology Applied
Scientific EffectElectron beam heating: Electron Beam

Implementation Method 3

With the heat insulation layer, the heating resistance of the workpieces is increased and therefore the service life during operation is also extended

Methodology Applied
Scientific EffectThermal insulation: Thermal Insulation

Data Source

PatentUS11795542B2Apparatus and method for coating workpieces
Publication Date: 2023.10.24 ALD VACUUM TECH GMBH
  • US11795542B2 patent drawing
  • US11795542B2 patent drawing
  • US11795542B2 patent drawing

AI summary

An apparatus and a method for coating workpieces with thermal barrier coatings. A manipulator shaft is guided here through a duct equipped with telescopic segments into the process chamber. The invention permits a particularly compact configuration of the plant.