Telescoping Robot Arm With Floating Stage for Long-Reach Transfer
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Solution Overview
Problem
Current substrate transfer systems in the semiconductor industry are costly, require large footprints, and lack versatility in handling substrates of varying weights and distances, failing to balance high throughput with minimized cost and size.
Innovation Solution
A telescoping linear extension robot with two driven extension stages and a floating intermediate stage, allowing for extended reach without increasing physical footprint or complexity, by using a motor-driven mechanism where the intermediate platform moves independently to enhance the extendable range.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple robots are used for substrate transfer, then throughput is improved, but floor footprint and cost increase
Solution Approach 1:
The robot arm is divided into multiple telescoping segments that can extend and retract independently. Each segment contains its own drive mechanism, allowing the arm to achieve extended reach without requiring multiple separate robot units, thus maintaining high throughput while reducing floor footprint.
Solution Approach 2:
The telescoping segments are nested within each other, with inner segments containing outer segments. This nested structure allows the robot to compactly store its extended length when not in use, minimizing the floor footprint while maintaining the capability for extended reach when needed for substrate transfer.
2Ease of operation
If SCARA robots or basic linear extension drives are used, then linear movement is achieved, but versatility for varying distances and weights is limited
Solution Approach 1:
The robot employs dynamically adjustable telescoping segments that can extend to different lengths based on the specific substrate transfer requirements. Each segment can be independently controlled to achieve optimal reach for different distances and weights, providing versatility while maintaining ease of linear movement operation.
Solution Approach 2:
The telescoping robot arm is designed to handle multiple functions: it can transfer substrates of varying weights over different distances by adjusting the extension of its segments. This multi-functional capability replaces the need for multiple specialized robots, enhancing versatility while maintaining operational simplicity.
3Length of moving object
If extended reach is achieved through traditional means, then substrate transport distance is increased, but system complexity and cost increase
Solution Approach 1:
The extended reach is achieved by dividing the arm into multiple telescoping segments, each with its own compact drive mechanism. This segmentation allows the system to achieve long extendable range without requiring a single complex mechanism, thereby reducing overall system complexity and cost compared to traditional single-stage extension systems.
Data Source
AI summary
A telescoping linear extension robot includes a base configured to support the telescoping linear extension robot, a first driven platform, drivingly coupled to the base, a second driven platform, drivingly coupled to the first driven platform, and a floating intermediate platform. The intermediate platform is configured to increase the extendable range of the driven extensions by facilitating additional extension using force generated by the driven platforms of the robot. This, in turn, allows for long-reach robot solutions with reduced physical footprint, complexity and cost.