TEM Detector CMOS Readout for Charging and Bubbling Artifacts

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Solution Overview

Problem

Cryo-TEM imaging is degraded by artifacts such as specimen charging and bubbling, which reduce the quality and usability of the images, as existing methods like pre-illumination and spot-scan imaging either introduce heating or reduce the useful data collection time.

Innovation Solution

A detector system that reads out image data from pixels at different times during acquisition, analyzes the data in real-time or offline to identify and eliminate artifacts, using CMOS technology for fast readout and on-chip processing to adjust the imaging process and discard or store data accordingly, thereby maximizing the quality of the final image.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If pre-illumination is used to eliminate charging artifacts, then charging artifacts are reduced, but the sample is heated which introduces other artifacts

Engineering Contradiction:
Improvecharging artifactsVSAvoidsample heating
Core Design Contradiction:
Object-affected harmful factorsVSTemperature

Solution Approach 1:

The system performs preliminary detection of charging artifacts by analyzing image data acquired during the imaging process. When charging artifacts are detected, the system proactively adjusts imaging parameters or pauses acquisition before severe heating occurs, rather than continuously pre-illuminating the sample.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system continuously monitors image data for charging artifacts and uses this feedback to dynamically control the electron beam exposure. When charging is detected, the system adjusts the imaging parameters in real-time, creating a closed-loop control system that prevents both charging artifacts and excessive heating.

Inventive Principle:
Principle #23Feedback

2Object-affected harmful factors

If spot-scan imaging is used to overcome charging and beam induced movement, then charging artifacts are reduced, but the time for data collection is reduced

Engineering Contradiction:
Improvecharging artifactsVSAvoiddata collection time
Core Design Contradiction:
Object-affected harmful factorsVSProductivity

Solution Approach 1:

The system applies charging compensation selectively only to the regions or frames where charging artifacts are detected, rather than uniformly applying spot-scan imaging to the entire sample throughout the acquisition process. This partial application maintains data collection efficiency while still addressing charging problems where they occur.

Inventive Principle:
Principle #16Partial or excessive action

Solution Approach 2:

The system dynamically adjusts the imaging mode between conventional scanning and spot-scan approaches based on real-time detection of charging artifacts. When charging is present, it switches to spot-scan for affected regions; when charging is absent, it uses conventional scanning to maximize data collection speed.

Inventive Principle:
Principle #15Dynamics

3Productivity

If continuous data collection is performed, then more data is acquired, but artifacts such as bubbling increase and degrade image quality

Engineering Contradiction:
Improvedata collection amountVSAvoidbubbling artifacts
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

The system performs preliminary detection of bubbling artifacts by analyzing image data during acquisition. When bubbling is detected, the system proactively adjusts imaging parameters or pauses acquisition before severe degradation occurs, allowing resumption of data collection under improved conditions.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system continuously monitors image data for bubbling artifacts and uses this feedback to dynamically control the electron beam exposure. When bubbling is detected, the system adjusts the imaging parameters in real-time or pauses acquisition temporarily, creating a closed-loop control that maximizes data collection while preventing severe artifact formation.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Significantly improves the quality and scientific usability of TEM images by reducing or eliminating charging and bubbling artifacts, allowing for continuous data collection under better specimen conditions.

Implementation Method 1

some electrons are diffracted

Methodology Applied
Scientific EffectElectron diffraction: Diffraction

Implementation Method 2

some electrons are absorbed

Methodology Applied
Scientific EffectElectron absorption: Absorption (physical)

Implementation Method 3

the electrons impinge on a phosphor, which emits light

Methodology Applied
Scientific EffectPhosphorescence: Phosphorescence

Implementation Method 4

The light impinges on a semiconductor detector and creates electron-hole pairs

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentEP2423942B1Detector system for transmission electron microscope
Publication Date: 2016.01.13 FEI CO
  • EP2423942B1 patent drawingFigure 1
  • EP2423942B1 patent drawingFigure 2
  • EP2423942B1 patent drawingFigure 3~4

AI summary

In a transmission electron microscope detector system, image data is read out from the pixels and analyzed during an image acquisition period. The image acquisition process is modified depending on the results of the analysis. For example, the analyses may indicate the inclusion in the data of an image artifact, such as charging or bubbling, and data including the artifact may be eliminated form the final image. CMOS detectors provide for selective read out of pixels at high data rates, allowing for real-time adaptive imaging.