In-Situ TEM Heating Chip With Gas Flow Control and Low Sample Drift

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Solution Overview

Problem

Existing in-situ transmission electron microscope (TEM) chips are limited in their ability to conduct multi-functional studies, particularly in high-temperature gas phase reactions and electrochemical reactions, due to lack of temperature control, gas flow direction control, and high sample drift rates, which hinder the understanding of catalyst morphology and material synthesis processes.

Innovation Solution

A high-resolution in-situ gas phase heating chip for TEM, comprising a top and bottom chip bonded by a metal layer, with features like symmetrical spiral heating wires, controlled gas flow, and low sample drift mechanisms, enabling precise temperature control and observation of material changes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a single-function electrochemical chip or heating chip is used, then the chip can be used for electrochemical or heating chemical reactions, but it cannot meet the requirements of multi-functional chemical reaction systems

Engineering Contradiction:
Improvefunctional versatilityVSAvoidchip structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent combines electrochemical and heating functions into a single in-situ TEM chip by integrating a working electrode, counter electrode, reference electrode, and heating wire within the same chip structure. This allows the chip to perform both electrochemical reactions and thermal treatments simultaneously or sequentially, resolving the contradiction between functional versatility and device complexity.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The chip is designed as a universal platform that can accommodate both electrochemical studies and high-temperature gas phase reactions. The integrated structure with multiple functional components (electrodes and heating elements) enables the same chip to serve multiple purposes across different research applications.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Manufacturing precision

If traditional single-function in-situ chips are used, then the chip structure is simple, but they fail to provide rapid temperature control and high-resolution studies of catalyst changes

Engineering Contradiction:
Improvetemperature control precisionVSAvoidchip structure
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The chip employs localized heating through a heating wire positioned specifically in the observation region, allowing rapid temperature control precisely where needed. The electrochemical cells are also locally configured with electrodes positioned for optimal performance in their respective regions, achieving high precision without requiring complex overall chip architecture.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The chip allows for high-resolution, real-time observation of material changes under controlled temperature and gas flow conditions, enhancing the understanding of catalyst morphology and material synthesis processes.

Implementation Method 1

a heating wire and four contact electrodes are formed in the heating layer

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 2

a top chip and a bottom chip combined via a metal bonding layer

Methodology Applied
Scientific EffectMetal bonding: Welding

Data Source

PatentUS12614694B2Transmission electron microscope in-situ chip and preparation method therefor
Publication Date: 2026.04.28 XIAMEN CHIP NOVA TECH CO LTD
  • US12614694B2 patent drawing
  • US12614694B2 patent drawing
  • US12614694B2 patent drawing

AI summary

The present disclosure discloses a transmission electron microscope in-situ chip and a preparation method thereof. The transmission electron microscope in-situ chip includes a transmission electron microscope high-resolution in-situ gas phase heating chip, a transmission electron microscope high-resolution in-situ liquid phase heating chip and a transmission electron microscope in-situ electrothermal coupling chip. The transmission electron microscope high-resolution in-situ gas phase heating chip and the transmission electron microscope high-resolution in-situ liquid phase heating chip are respectively suitable for gas samples and liquid samples, and the transmission electron microscope in-situ electrothermal coupling chip realizes the multi-functional embodiment of electrothermal coupling. The three transmission electron microscope in-situ chips have the advantages of high resolution and low sample drift rate.