TEM Sample Holder Structure for Multi-Sample Inspection
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Solution Overview
Problem
Existing sample holders for transmission electron microscopes have low sample loading efficiency, limiting the effectiveness of semiconductor device inspections.
Innovation Solution
A sample holder design featuring multiple holding plates with angled orientations and sample holes that allow for simultaneous inspection of multiple samples, enhancing loading and inspection efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a conventional single holding plate design is used, then the structure is simple, but the sample loading efficiency is low
Solution Approach 1:
The holding plate is divided into multiple segments (first holding plate, second holding plate, etc.) extending from the head in the first direction. Each holding plate can independently accommodate samples, allowing multiple samples to be loaded simultaneously while maintaining a relatively simple overall structure that extends from a single head.
Solution Approach 2:
The patent transitions from a single-plane holding structure to a multi-dimensional arrangement by extending holding plates in the first direction from the head, with each plate oriented at different angles. This spatial arrangement increases sample capacity without proportionally increasing structural complexity.
2Productivity
If multiple holding plates with different orientations are used, then multiple samples can be inspected simultaneously, but the alignment precision with incident light becomes more difficult to control
Solution Approach 1:
Each holding plate is designed with specific local characteristics - the first holding plate has a first main surface with a specific orientation, the second holding plate has a second main surface with a different orientation. This allows each sample to be optimally aligned for inspection while maintaining overall system functionality.
Solution Approach 2:
The head is designed to be rotatable, allowing dynamic adjustment of the holding plates' orientations. This enables the system to adaptively align samples with the incident light direction during inspection, maintaining precision across multiple samples with different orientations.
3Quantity of substance
If samples are accommodated in traditional single-orientation holes, then the structure is simple, but the sample loading capacity is limited
Solution Approach 1:
The sample accommodation structure is segmented into multiple holding plates, each with its own sample holes. This segmentation allows multiple samples to be accommodated in different orientations and positions, increasing overall capacity while keeping each individual sample hole configuration relatively simple.
Solution Approach 2:
Each holding plate serves multiple functions: it provides structural support, defines sample orientation through its main surface, and contains sample holes for accommodating samples. This multi-functionality increases sample capacity without proportionally increasing overall device complexity.
Data Source
AI summary
A sample holder includes a head, a first holding plate extending in a first direction from one surface of the head and including at least one first sample hole configured to accommodate at least one first sample and a first main surface configured such that the at least one first sample accommodated in the at least one first sample hole is exposed at the first main surface, and a second holding plate extending in the first direction from the one surface of the head and including at least one second sample hole configured to accommodate at least one second sample and a second main surface configured such that the at least one second sample accommodated in the at least one second sample hole is exposed at the second main surface, wherein a direction perpendicular to the first main surface of the first holding plate differs from a direction perpendicular to the second main surface of the second holding plate.