TEM Holder with PEEK Disk and O-Rings for Vacuum Stability

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Solution Overview

Problem

Conventional TEM holders lack the ability to perform multiple functions simultaneously, such as high-resolution imaging, electrical probing, and optical measurements, due to limited functionality and stability, especially in ultra-high resolution polepiece gaps, and struggle with maintaining high vacuum isolation and sensitivity.

Innovation Solution

A TEM holder with integrated double-tilt functionality, incorporating a miniature PEEK insulating disk and Viton O-rings for vibration damping and insulation, allowing for high sensitivity, stability, and vacuum isolation, while accommodating both electrical and optical probing components within a compact design that fits in ultra-high resolution polepiece gaps.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If conventional TEM holders are used with singular functionality, then device complexity is reduced, but adaptability and versatility are limited

Engineering Contradiction:

Improvefunctional integrationVSAvoidholder structure

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent combines multiple functional components (manipulation system, fiber optic component, double tilting mechanism) into a single integrated specimen rod holder, enabling simultaneous electrical probing, optical measurements, and high-resolution imaging capabilities within one device

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The holder is designed to perform multiple functions including electrical measurements, optical fiber coupling, double tilting for high-resolution imaging, and manipulation of probes, making it a universal platform for various in situ experiments

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Manufacturing precision

If the polepiece gap is increased to accommodate in situ holder components, then device complexity is reduced, but point-to-point resolution deteriorates

Engineering Contradiction:

Improvepoint-to-point resolutionVSAvoidpolepiece gap

Core Design Contradiction:

Manufacturing precisionVSVolume of stationary object

Solution Approach 1:

The design nests multiple components (manipulation system, fiber optic, tilting mechanism) within a compact configuration that fits within the limited polepiece gap space, maintaining ultra-high resolution while accommodating all necessary in situ functionality

Inventive Principle:

Principle #7Nested doll (Nesting)

Solution Approach 2:

The holder utilizes three-dimensional spatial optimization to arrange components vertically and radially within the constrained gap, allowing multiple functions to coexist in the limited space without compromising resolution

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

3Adaptability or versatility

If manipulation systems are added to enable probe contact for electrical measurements, then adaptability is improved, but stability and sensitivity are reduced due to space occupation

Engineering Contradiction:

Improveelectrical probing capabilityVSAvoidstability and sensitivity

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

The manipulation system is segmented into independent, miniaturized components that can be precisely controlled with minimal space occupation, reducing mechanical interference and improving stability during electrical probing operations

Inventive Principle:

Principle #1Segmentation

4Adaptability or versatility

If electrodes are deposited on sample surface using FIB or sputtering, then electrical field input capability is improved, but measurement precision is reduced due to larger electrode area

Engineering Contradiction:

Improveelectrical field inputVSAvoidlocalized biasing precision

Core Design Contradiction:

Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The design extracts the electrical field input capability from traditional large-area deposited electrodes and replaces it with a localized probe-based system, enabling precise point-contact biasing and measurements with minimal sample area affected

Inventive Principle:

Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables ultra-high sensitivity electric probing and scanning tunneling microscopy with high stability, achieving high vacuum isolation and large range of motion, allowing for simultaneous high-resolution imaging and in situ experiments like CL measurements and biasing.

Implementation Method 1

Viton O-rings for vibration damping and insulation

Methodology Applied

Scientific EffectVibration damping: Damping

Implementation Method 2

miniature PEEK insulating disk and Viton O-rings for vibration damping and insulation

Methodology Applied

Scientific EffectElectrical insulation: Dielectric

Data Source

PatentUS10520527B2Miniature device for ultra high sensitivity and stability probing in vacuum

Publication Date: 2019.12.31 THE RGT UNIV OF MICHIGAN

AI summary

The present disclosure relates to in situ transmission electron microscope (TEM) holders with improved stability and electrical sensitivity. The holders feature a front bearing seal and a rear bearing seal which allow the holders to achieve high sensitivity, high stability, large range of motion and high vacuum isolation. The bearings use a PEEK insulating disk as a pivot point for translation and tilting motion, and use O-rings to dampen vibrations, provide electrical and vacuum insulation, and to set a grabbing force between the bearing and the probe.