TEM Mesh Transfer Positioning for Faster Sample Observation

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Solution Overview

Problem

The process of searching for the reference area of a mesh mounted on a holder within a transmission electron microscope (TEM) is time-consuming, limiting observation throughput, and the mesh's position can shift when fixed by a presser, necessitating a technique to omit this step and enhance throughput.

Innovation Solution

A transfer device with a holder that acquires and outputs positional information about the mesh and holder, coupled with a charged particle beam device to set coordinates based on this information, allowing direct sample observation without searching for the reference area.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the mesh is fixed to the holder using a mesh presser, then the mesh can be securely mounted on the holder, but the reference area of the mesh shifts relative to the holder, requiring a time-consuming search step in the TEM

Engineering Contradiction:
Improvemesh mounting stabilityVSAvoidobservation throughput
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The patent applies preliminary action by acquiring positional information about the reference area on the mesh and the holder position before the mesh is pressed against the holder. This allows the TEM to pre-calculate the expected position of the reference area, eliminating the need for time-consuming search operations after mounting. The control unit stores this positional information and uses it to directly navigate to the sample position.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent replaces the mechanical search process (manually or automatically scanning to find the reference area) with an information-based system. Positional information about the reference area and holder is acquired and processed by a control unit, which then directly positions the sample without mechanical searching. This substitution of mechanical search with computational positioning resolves the contradiction between secure mounting and observation throughput.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Measurement precision

If a search step is performed to locate the reference area in the TEM, then accurate sample positioning is achieved, but observation throughput is significantly reduced

Engineering Contradiction:
Improvesample positioning accuracyVSAvoidobservation throughput
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The patent performs preliminary acquisition of positional information about the reference area and holder position before the mesh is pressed against the holder. The control unit uses this pre-acquired information to calculate and set the holder position, eliminating the need for subsequent search steps. This maintains measurement precision while dramatically improving productivity by removing the time-consuming search operation.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent introduces positional information as an intermediary between the mesh mounting process and the observation process. Instead of directly searching for the reference area in the TEM, the system uses pre-acquired positional information as a mediator to directly position the holder and mesh, achieving both accurate positioning and high throughput.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Device complexity

If the reference area position is not pre-acquired, then the system remains simple, but the search step cannot be omitted and throughput remains limited

Engineering Contradiction:
Improvesystem complexityVSAvoidobservation throughput
Core Design Contradiction:
Device complexityVSProductivity

Solution Approach 1:

The patent applies preliminary action by acquiring positional information during the mesh mounting process itself, before the mesh is pressed against the holder. This timing allows the information to be captured without adding complex post-mounting operations. The control unit stores this information and uses it to directly position the sample, improving throughput while maintaining relatively simple system architecture.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system performs self-service by automatically acquiring and processing positional information without requiring complex external intervention. The control unit automatically uses the pre-acquired positional information to set the holder position, eliminating the need for manual search operations or complex automated search algorithms, thus improving throughput with minimal increase in system complexity.

Inventive Principle:
Principle #25Self-service

Data Source

PatentUS12586751B2Transfer device and analysis system
Publication Date: 2026.03.24 HITACHI HIGH TECH CORP
  • US12586751B2 patent drawing
  • US12586751B2 patent drawing
  • US12586751B2 patent drawing

AI summary

Provided is a technique capable of shortening observation throughput of a sample. A transfer device 2 includes a holder 24 configured to hold a mesh MS on which a sample to be analyzed using a charged particle beam device 3 is mounted, a position information acquisition function configured to acquire first information about a positional relationship between the mesh MS and the holder 24, and a position information output function configured to output the first information to the charged particle beam device 3.