TEM Phase Plate Electronic Structure Modification

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Solution Overview

Problem

Transmission Electron Microscopes (TEMs) face challenges in imaging weak-phase samples due to low contrast visibility of large structures caused by the Contrast Transfer Function (CTF) being zero or near zero for low spatial frequencies, and existing phase plates require precise centering and are difficult to control for reliable operation.

Innovation Solution

A method involving a phase plate formed by irradiating a thin film with a focused electron beam to create a vacuum potential, resulting in a positive phase contrast without contamination, which is self-centered and easily controlled, using a heated amorphous carbon film to modify the electronic structure and induce a phase shift between diffracted and undiffracted electrons.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a phase plate with microscopic holes is used to introduce phase difference, then low spatial frequency contrast is improved, but centering precision and manufacturing complexity increase significantly

Engineering Contradiction:
Improvelow spatial frequency contrastVSAvoidcentering precision requirement
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The invention extracts the phase-shifting function from the geometric structure (holes) and transfers it to the electronic structure (vacuum potential regions) of the thin film. By irradiating specific areas with electron beams, localized vacuum potential changes create phase shifts without requiring precise hole positioning or centering, thus resolving the contradiction between contrast improvement and centering complexity

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The invention replaces the mechanical/physical hole structure with an electronic field-based phase plate. Instead of using physical holes that require precise mechanical centering, the phase shift is achieved through electron beam-induced vacuum potential changes in the thin film, substituting a mechanical system with an electronic field system that is easier to control and center

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Measurement precision

If a thin film is irradiated with electron beam to create contamination spot, then phase shift is achieved, but contamination control becomes difficult

Engineering Contradiction:
Improvephase shiftVSAvoidcontamination control
Core Design Contradiction:
Measurement precisionVSEase of manufacture

Solution Approach 1:

The invention changes the fundamental parameter from material contamination to electronic structure modification. Instead of relying on contamination spots that are difficult to control, the phase shift is achieved by changing the vacuum potential through electron beam irradiation, which creates localized regions with different electronic structures. This parameter change from chemical contamination to electronic field modification makes the process more controllable and reversible

Inventive Principle:
Principle #35Parameter changes

3Ease of operation

If electron beam irradiation is used to build phase plate, then self-centering is achieved, but material removal or damage may occur

Engineering Contradiction:
Improveself-centeringVSAvoidthin film integrity
Core Design Contradiction:
Ease of operationVSStrength

Solution Approach 1:

The invention uses partial action by irradiating only specific regions of the thin film with the electron beam to create localized vacuum potential changes. The irradiation dose and area are carefully controlled to achieve the necessary phase shift without excessive energy input that would cause material damage. This partial action approach maintains thin film integrity while achieving self-centering through selective electronic structure modification

Inventive Principle:
Principle #16Partial or excessive action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances image contrast by modifying the electronic structure of the thin film, providing a reliable and contamination-free positive phase contrast that is easily identifiable and controlled, allowing for improved imaging of samples without the need for precise centering or complex contamination management.

Implementation Method 1

preparing the phase plate involves locally building up a vacuum potential resulting from a change in the electronic structure of the thin film by irradiating the phase plate with a focused beam of electrons

Methodology Applied
Scientific EffectElectron beam irradiation: Electron Beam

Implementation Method 2

the vacuum potential leading to a phase shift that is less than at the non-irradiated thin film

Methodology Applied
Scientific EffectPhase shift: Phase Modulation

Data Source

PatentEP2797101B1Method of using a phase plate in a transmission electron microscope
Publication Date: 2017.05.31 FEI CO
  • EP2797101B1 patent drawingFigure 1
  • EP2797101B1 patent drawingFigure 2~3
  • EP2797101B1 patent drawingFigure 4

AI summary

The invention relates to a method of using a phase plate (118) in a transmission electron microscope (100), the phase plate comprising a thin film, the method comprising: introducing the phase plate in the transmission electron microscope; preparing the phase plate by irradiating the film with a focused electron beam; introducing a sample (108) in the transmission electron microscope; and forming an image of the sample using the prepared phase plate, characterized in that preparing the phase plate involves locally building up a vacuum potential resulting from a change in the electronic structure of the thin film by irradiating the phase plate with a focused beam of electrons, the vacuum potential leading to an absolute phase shift |ϕ| with a smaller value than at the non-irradiated thin film. Preferably the phase plate is heated to avoid contamination. The phase shift achieved with this phase plate can be tuned by varying the diameter of the irradiated spot.