TEM Probe Mechanical Detachment for Rapid Sample Prep

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Solution Overview

Problem

The preparation of samples for transmission electron microscopes (TEMs) is labor-intensive and time-consuming, especially when using conventional focused ion beam methods, which require multiple time-consuming steps of ion beam deposition and milling, limiting their practicality for manufacturing process control.

Innovation Solution

A method involving ion beam etching to free the sample from a work piece, attaching it to a probe using charged particle beam deposition, transporting it to a sample holder, and mechanically detaching the probe without ion beam milling, thereby reducing processing time and maintaining sample integrity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If conventional ion beam deposition and milling methods are used to attach and detach the probe, then the sample can be prepared and transported, but the process becomes time-consuming and labor-intensive

Engineering Contradiction:

Improvesample preparation speedVSAvoidtime for ion beam deposition and milling

Core Design Contradiction:

ProductivityVSLoss of time

Solution Approach 1:

The patent extracts the time-consuming ion beam milling step from the probe detachment process. Instead of using ion beam milling to free the probe from the sample holder, the method allows mechanical removal of the probe, eliminating the need for ion beam milling in the detachment step and significantly reducing preparation time

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The probe is designed with a pre-formed structure that enables easy mechanical detachment. The probe holder and probe are configured so that the probe can be readily inserted and removed without requiring complex ion beam processing for attachment or detachment, preparing the system in advance for quick sample exchange

Inventive Principle:

Principle #10Preliminary action

2Ease of manufacture

If ion beam milling is used to detach the probe from the sample, then the probe can be freed, but the process damages the probe and increases processing time

Engineering Contradiction:

Improveprobe detachment easeVSAvoidprobe damage from ion beam milling

Core Design Contradiction:

Ease of manufactureVSObject-affected harmful factors

Solution Approach 1:

The patent replaces the ion beam milling system with a simple mechanical detachment system. The probe is designed to be mechanically removable from the sample holder through straightforward physical manipulation, eliminating the need for damaging ion beam milling and reducing probe wear and damage

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The probe design accepts that probes may be single-use or limited-life components that can be easily replaced. By designing for easy mechanical detachment rather than durable permanent attachment, the system allows probes to be quickly exchanged without damage, treating them as consumable components

Inventive Principle:

Principle #27Cheap short-living objects (Disposable)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method significantly reduces the time required for sample preparation, making TEM analysis more practical for manufacturing process control by streamlining the sample preparation process while avoiding damage to the probe and ensuring sample attachment to the holder.

Implementation Method 1

a sample is freed from a work piece using ion beam etching

Methodology Applied

Scientific EffectIon beam etching: Ion Beam

Implementation Method 2

The sample is attached to a probe using charged particle beam deposition

Methodology Applied

Scientific EffectCharged particle beam deposition: Deposition (physical)

Data Source

PatentUS10053768B2Detaching probe from TEM sample during sample preparation

Publication Date: 2018.08.21 FEI CO

AI summary

An improved method of preparing a TEM sample. A sample is extracted from a work piece and attached to a probe for transport to a sample holder. The sample is attached to the sample holder using charged particle beam deposition, and mechanically separated from probe by moving the probe and the sample holder relative to each other, without severing the connection using a charged particle beam.