TEM Sample Preparation Using Segmented Grabbing Portions
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Solution Overview
Problem
Conventional methods for preparing transmission electron microscope samples using focused ion beams result in contamination of the sample surface when processing the finished surface while still coupled to the sample body, leading to reduced productivity and image quality.
Innovation Solution
A method involving a charged particle beam system that cuts out a sample piece with a coupling portion remaining attached to the sample body, allowing the finished surface to be covered during detachment, preventing contamination and enabling processing of the sample piece while still coupled, and transferring it to a sample holder without re-processing the surface.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the finished surface is processed with the sample piece being coupled to the sample body, then productivity is improved, but contamination is generated on the sample piece surface under the influence of the charged particle beam
Solution Approach 1:
The sample piece is divided into two functional regions: a finished surface region that requires high precision and cleanliness for TEM observation, and a grabbing portion region that serves as a handling interface. The grabbing portion is positioned away from the finished surface, allowing microtweezers to grasp the sample piece without contacting the finished surface, thus preventing contamination while enabling processing with the sample coupled to the sample body.
Solution Approach 2:
The grabbing portion acts as an intermediary element between the microtweezers and the finished surface. By providing this intermediate grasping region, the system enables manipulation and transfer of the sample piece without direct contact between the tweezers and the sensitive finished surface, thereby preventing contamination during handling and processing operations.
2Object-affected harmful factors
If the sample piece is detached before finish-processing, then contamination is avoided, but productivity decreases due to additional processing steps
Solution Approach 1:
The finished surface is processed and prepared in advance while the sample piece is still coupled to the sample body, before the detachment operation is performed. This preliminary processing approach allows the finished surface to be created and refined without risk of contamination from subsequent handling or detachment operations, thereby eliminating the need for re-processing after detachment and improving overall productivity.
Solution Approach 2:
The conventional sequence is inverted: instead of detaching the sample piece first and then processing the finished surface, the finished surface is processed first while the sample remains attached to the sample body, and only after the finished surface is complete is the sample piece detached. This inverted sequence prevents contamination and eliminates redundant processing steps.
3Ease of operation
If microtweezers contact the finished surface for transfer, then handling is simplified, but the quality of the observed image is adversely affected
Solution Approach 1:
The sample piece is segmented into a finished surface region and a grabbing portion region. The grabbing portion is specifically designed as a separate grasping interface that is positioned away from the finished surface. This segmentation allows microtweezers to grasp and manipulate the sample piece through the grabbing portion without contacting the finished surface, thereby maintaining image quality while preserving ease of operation for transfer and mounting operations.
Solution Approach 2:
The grabbing portion serves as an intermediary grasping interface between the microtweezers and the finished surface. By providing this intermediate region for manipulation, the system enables easy handling and transfer of the sample piece without direct contact between the tweezers and the sensitive finished surface, thus preserving image quality while maintaining operational ease.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach increases productivity by preventing contamination and allowing for the processing of the finished surface while the sample piece is still coupled to the sample body, enhancing the quality of the transmission electron microscope images.
Implementation Method 1
a first step of cutting out the sample piece for a transmission electron microscope from the sample body with the charged particle beam
Implementation Method 2
a second step of grabbing with the microtweezers the grabbing portion of the sample piece for a transmission electron microscope
Implementation Method 3
a fourth step of grabbing with the microtweezers the sample piece for a transmission electron microscope detached in the third step to transfer and fix the sample piece for a transmission electron microscope onto the sample holder
Data Source
AI summary
Provided is a method of preparing a sample piece for a transmission electron microscope, the sample piece for a transmission electron microscope including a substantially planar finished surface which can be observed with the transmission electron microscope and a grabbing portion which microtweezers can grab without contacting the finished surface. The method of preparing a sample piece for a transmission electron microscope is characterized by including: a first step of cutting out the sample piece from a sample body Wa with a charged particle beam, the sample piece being coupled to the sample body at a coupling portion; a second step of grabbing with the microtweezers the grabbing portion of the sample piece with the finished surface of the sample piece cut out in the first step being covered with the microtweezers; a third step of detaching the sample piece grabbed with the microtweezers in the second step from the sample body by cutting the coupling portion with the charged particle beam with a grabbed state of the sample piece being maintained; and a fourth step of transferring and fixing with the microtweezers the sample piece detached in the third step onto a sample holder.