TEM Sample Support X-Ray Detector With Expanded Solid Angle

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Solution Overview

Problem

Existing Energy Dispersive X-Ray Spectroscopy (EDS) detectors in Transmission Electron Microscopes (TEM) have limited detector solid angles, leading to inaccurate and imprecise measurements due to a restricted line-of-sight, resulting in longer acquisition times and unreliable data.

Innovation Solution

A sample support for TEMs that includes a base with apertures and insulators, electrodes penetrating the insulator, and a membrane for x-ray detection, allowing direct measurement of x-rays emitted by the sample object, and generating electrical currents for precise mapping and composition analysis.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a traditional separate EDS detector is used in the TEM column, then the detector structure is simple and easy to install, but the detector solid angle is limited to less than 20% of the maximum, resulting in limited measurement accuracy and precision

Engineering Contradiction:
ImproveEDS measurement accuracy and precisionVSAvoiddetector structure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent merges the EDS detector with the sample holder into an integrated unit. The detector is positioned directly adjacent to the sample support, allowing the sample holder to serve dual functions as both a sample mounting device and an x-ray detection system. This integration eliminates the need for separate detector installations and achieves a detector solid angle of at least 50% of the maximum, significantly improving measurement precision while maintaining structural simplicity.

Inventive Principle:
Principle #5Merging (Combining)

2Productivity

If a traditional separate EDS detector is used in the TEM column, then the detector can be easily installed, but the detector solid angle is limited, resulting in longer acquisition times

Engineering Contradiction:
Improvex-ray detection speedVSAvoiddetector configuration complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent implements a nested configuration where the detector is positioned within the bore of the sample holder. The detector fits inside the cylindrical space created by the sample holder structure, maximizing the detector solid angle without requiring additional external hardware. This nested arrangement enables faster x-ray detection while keeping the overall device configuration simple and compatible with standard TEM columns.

Inventive Principle:
Principle #7Nested doll (Nesting)

3Quantity of substance

If the detector is positioned far from the sample object, then the detector structure is simple, but the line-of-sight is restricted and only a portion of emitted x-rays are detected

Engineering Contradiction:
Improvenumber of detected x-raysVSAvoiddetector positioning complexity
Core Design Contradiction:
Quantity of substanceVSEase of operation

Solution Approach 1:

The patent transitions from a lateral detector positioning (perpendicular to the electron beam) to an axial positioning where the detector is located directly beneath the sample support along the beam axis. This dimensional change allows the detector to capture x-rays emitted in all directions from the sample, achieving a detector solid angle of at least 50% of the maximum. The detector is positioned within easy reach of the sample without requiring complex lateral adjustments, thereby increasing the quantity of detected x-rays while maintaining operational simplicity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances the detector solid angle, enabling faster and more accurate x-ray detection, improving the precision and speed of elemental mapping in TEMs without requiring additional hardware installation.

Implementation Method 1

the base absorbs a portion of the emitted x-rays and generates an electrical current

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS20260071978A1Sample support x-ray detector
Publication Date: 2026.03.12 NANOELECTRONIC IMAGING INC
  • US20260071978A1 patent drawing
  • US20260071978A1 patent drawing
  • US20260071978A1 patent drawing

AI summary

A sample support is provided including a base, an insulator, and one or more electrodes. The base has an upper surface with a first aperture and a lower surface with a second aperture. The insulator extends along the upper surface and/or the lower surface of the base. The insulator has a membrane that is a portion of the insulator that extends into the first aperture or the second aperture. One or more electrodes are electrically connected to the base and penetrate the insulator and/or the upper surface of the base. The sample object is placed on the membrane, the sample object emits x-rays, and the base absorbs a portion of the emitted x-rays and generates an electrical current. The electrode measures the electrical current and the electrical current allows for measurement and mapping physical properties of the sample object.