TEM Thin Film Alignment via Ronchigram and Halo Feedback

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Solution Overview

Problem

Existing methods for aligning thin films in Transmission Electron Microscopes (TEMs) to achieve the on-plane condition for forming hole-free phase plates lack precision, especially for featureless films without contamination or markers, leading to difficulties in determining the correct alignment for enhanced contrast imaging.

Innovation Solution

An automated method involving focusing the condenser system, illuminating the thin film with electrons, and iteratively adjusting the excitation to achieve on-plane illumination by observing the effects on the beam, either through Ronchigram contrast or halo formation, without relying on film features for alignment.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-generated harmful factors

If a featureless thin film is used for hole-free phase plate formation, then artifact introduction is minimized, but alignment precision to the diffraction plane deteriorates

Engineering Contradiction:
Improveartifact introductionVSAvoidalignment precision
Core Design Contradiction:
Object-generated harmful factorsVSMeasurement precision

Solution Approach 1:

The method performs preliminary alignment actions by capturing images at multiple known condenser lens excitations before final phase plate formation. This preliminary imaging and analysis establishes the on-plane condition without requiring film features, enabling subsequent precise alignment of featureless films.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The method uses feedback from captured images at different condenser excitations to determine whether the thin film is in the on-plane condition. The image analysis provides feedback about alignment status, allowing iterative adjustment of condenser lens excitation to achieve precise on-plane positioning for artifact-free imaging.

Inventive Principle:
Principle #23Feedback

2Ease of operation

If conventional alignment methods are used for featureless films, then alignment process is simplified, but alignment accuracy to the diffraction plane deteriorates

Engineering Contradiction:
Improvealignment process simplicityVSAvoidalignment accuracy
Core Design Contradiction:
Ease of operationVSMeasurement precision

Solution Approach 1:

The method introduces feedback-based alignment by capturing images at multiple condenser excitations and analyzing them to determine on-plane condition. This automated feedback mechanism maintains operational simplicity while achieving high alignment accuracy, eliminating the need for manual feature identification on the film.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system performs self-alignment by using the thin film itself and the captured images to determine the on-plane condition, without requiring external markers or complex manual procedures. The alignment process serves itself by utilizing the inherent properties of the film and the imaging system.

Inventive Principle:
Principle #25Self-service

3Loss of time

If the thin film is not precisely aligned to the diffraction plane, then alignment time is reduced, but phase plate quality and contrast enhancement deteriorate

Engineering Contradiction:
Improvealignment timeVSAvoidphase plate quality
Core Design Contradiction:
Loss of timeVSReliability

Solution Approach 1:

The method performs preliminary alignment verification by capturing images at multiple condenser excitations before final phase plate formation. This preliminary action ensures proper alignment is achieved, preventing time loss during later adjustments and ensuring high phase plate quality.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The feedback mechanism analyzes images to determine on-plane condition, providing reliable alignment verification. This ensures that the thin film is precisely positioned in the diffraction plane, guaranteeing high phase plate quality and effective contrast enhancement while maintaining efficient alignment time.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables precise alignment of featureless thin films to the diffraction plane, allowing for the formation of high-quality hole-free phase plates that enhance contrast in TEM imaging without introducing artifacts, improving the visibility of low spatial frequency structures.

Implementation Method 1

focusing the condenser system with a first excitation associated with a first position of the diffraction plane

Methodology Applied
Scientific EffectElectron beam focusing: Focusing

Implementation Method 2

an objective lens for focusing the parallel or almost parallel beam on the diffraction plane

Methodology Applied
Scientific EffectDiffraction: Diffraction

Implementation Method 3

the phase plate introducing a phase difference between the diffracted beams and the undiffracted beam

Methodology Applied
Scientific EffectPhase shift: Phase Modulation

Implementation Method 4

The image is formed by interference of the elastically scattered and unscattered electrons (diffracted and undiffracted beams)

Methodology Applied
Scientific EffectInterference: Interference

Data Source

PatentUS9583303B2Aligning a featureless thin film in a TEM
Publication Date: 2017.02.28 FEI CO
  • US9583303B2 patent drawing
  • US9583303B2 patent drawing
  • US9583303B2 patent drawing

AI summary

When preparing a Hole-Free Phase Plates (HFPP) a preferably featureless thin film should be placed with high accuracy in the diffraction plane of the TEM, or a plane conjugate to it. Two methods for accurately placing the thin film in said plane are described. One method uses a Ronchigram of the thin film while the TEM is in imaging mode, and the magnification of the Ronchigram is tuned so that the magnification in the middle of the Ronchigram is infinite. The second method uses electrons scattered by the thin film while the TEM is in diffraction mode. When the thin film does not coincide with the diffraction plane, electrons scattered by the thin film seem to originate from another location than the cross-over of the zero beam. This is observed as a halo. The absence of the halo is proof that the thin film coincides with the diffraction plane.