Temperature Compensation for 3D Measurement Precision
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Solution Overview
Problem
Existing three-dimensional measurement apparatuses face challenges in achieving high-accuracy measurements when installed in environments with fluctuating temperatures, as thermal expansion and temperature unevenness can lead to errors in measurement results.
Innovation Solution
A temperature compensation apparatus that utilizes multiple temperature sensors to acquire temperature data from various positions of the measurement apparatus and the object being measured. This data is used to calculate a correction value through a polynomial model, which is then applied to the measurement result to correct for temperature-induced errors.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple temperature sensors and polynomial model are used for temperature compensation, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The measurement system is divided into multiple temperature sensing zones with separate temperature sensors placed at different positions (e.g., objective lens, stage, specimen). Each sensor independently measures temperature in its specific zone, allowing localized temperature compensation without requiring a single complex sensing system.
Solution Approach 2:
The system uses polynomial models that take multiple temperature parameters as inputs and dynamically calculate correction values based on the measured temperatures. The correction value is computed as a polynomial function of the measured temperatures, enabling adaptive compensation that adjusts to varying temperature conditions without hardware changes.
2Measurement precision
If temperature compensation is performed in variable temperature environments, then measurement accuracy is improved, but the complexity of temperature measurement and correction increases
Solution Approach 1:
Temperature sensors are positioned at key locations (objective lens, stage, specimen) to measure temperatures before they significantly affect the measurement process. The system proactively captures temperature data and calculates correction values in advance, allowing compensation to be applied to the measurement results without interrupting the measurement workflow.
Solution Approach 2:
The polynomial model acts as an intermediary that translates raw temperature measurements from multiple sensors into meaningful correction values. This mathematical mediator processes the temperature data and generates correction factors that can be directly applied to the measurement results, simplifying the overall compensation process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed solution enables accurate correction of measurement errors caused by environmental temperature changes, ensuring high-accuracy three-dimensional measurements even in variable temperature environments.
Implementation Method 1
a measured temperature acquisition part that acquires temperatures of the three-dimensional measurement apparatus during measurement, from a plurality of temperature sensors provided at a plurality of different positions of the three-dimensional measurement apparatus
Implementation Method 2
In a case where such a measurement apparatus is installed in an environment in which temperature fluctuates, such as in a factory, thermal expansion or the like may occur in various parts of an object to be measured and the measurement apparatus, causing an error in a measurement result
Data Source
AI summary
A temperature compensation apparatus including: a measured temperature acquisition part that acquires temperatures of the three-dimensional measurement apparatus during measurement; a measurement result acquisition part that acquires a measurement result of an object to be measured output by the three-dimensional measurement apparatus; a correction value calculation part that calculates a correction value of the measurement result using a model formula of temperature compensation, including a polynomial composed of values obtained by multiplying each of a plurality of temperatures by coefficients corresponding to each of the plurality of temperature sensors; and a correction part that calculates a corrected measurement value, which is a corrected measurement result obtained by adding the correction value to the measurement result or multiplying the correction value by the measurement result.