Temperature Controller Signal Switch for Calibration
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Solution Overview
Problem
Conventional temperature controllers in semiconductor manufacturing facilities require disconnection and reconnection of temperature sensors for comparative measurements and calibration, leading to potential miswiring and operational interruptions, as well as the need for facility shutdowns.
Innovation Solution
A temperature controller design that allows for comparative measurements and sensing calibration without separating the temperature sensor and input channel, utilizing a signal control unit to maintain electrical connections and switch states, enabling continuous operation and reducing the risk of miswiring and interruptions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the temperature sensor is disconnected from the sensor input connector for comparative measurement and calibration, then measurement accuracy and calibration can be performed, but the semiconductor manufacturing facility must be stopped and miswiring or operational mistakes may occur
Solution Approach 1:
The patent divides the connection system into two independent pathways: a normal operation channel connecting the temperature sensor to the temperature controller, and a measurement channel connecting the temperature sensor to the measuring device through a switch. This segmentation allows comparative measurement and calibration to be performed without disconnecting the sensor from the operational system, thus maintaining facility productivity while enabling measurement accuracy improvements.
2Reliability
If the temperature sensor is disconnected and reconnected for calibration, then sensing calibration can be performed, but miswiring and electrical contact errors may occur
Solution Approach 1:
The patent introduces a switch as an intermediary component between the temperature sensor and the measuring device. This switch enables the measurement device to access the temperature sensor signal without requiring physical disconnection or reconnection of the sensor. The intermediary switch eliminates the risk of miswiring and electrical contact errors associated with manual disconnection and reconnection operations, while still allowing calibration to be performed.
Data Source
AI summary
The inventive concepts provide a temperature controller for performing a comparative measurement process and a sensing calibration process without separating a temperature sensor and an input channel, if a comparative measurement process and a sensing calibration process of a temperature sensor for controlling a temperature of a semiconductor manufacturing facility are performed.