Temperature Regulator Power Saving Mode for Semiconductor Manufacturing
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Solution Overview
Problem
Current device manufacturing apparatuses face challenges in achieving high-precision temperature regulation and efficient electric power consumption, particularly when productivity is low, as primary and secondary temperature regulators consume excessive power even when heat generation is minimal.
Innovation Solution
A device manufacturing apparatus with a temperature regulator, controller, and console that allows for an electric power saving mode, where the temperature regulator can adjust target temperatures and reduce power consumption by shifting components to an idle state, using a GUI to set parameters for electric power saving modes and controlling the electric power controller to optimize energy use.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If primary temperature regulation using cooler and heat exchange is performed, then temperature control capability is improved, but electric power consumption increases when productivity is low
Solution Approach 1:
The patent applies dynamics by making the temperature regulation system adaptive to changing productivity conditions. The control unit dynamically adjusts the operation state of the cooler based on real-time detection of productivity levels, transitioning between active cooling and idle states to match actual heat generation requirements.
Solution Approach 2:
The patent implements feedback control through the control unit that detects productivity conditions and uses this information to regulate the cooler's operation. The system continuously monitors productivity and adjusts cooling intensity accordingly, creating a closed-loop control system that optimizes power consumption based on actual needs.
2Manufacturing precision
If secondary temperature regulation using high-sensitivity heater is performed near heat generating portion, then temperature precision is improved, but electric power consumption increases when heat generation is minimal
Solution Approach 1:
The system dynamically adjusts the operation of the high-sensitivity heater based on detected productivity levels. When productivity is low and heat generation is minimal, the control unit reduces or stops heater operation, thereby maintaining temperature precision when needed while avoiding wasteful power consumption during low-demand periods.
Solution Approach 2:
The control unit uses feedback from productivity detection to regulate heater operation. The system monitors actual thermal conditions and productivity levels, adjusting heater power accordingly to maintain precise temperature control only when necessary, thus optimizing the balance between precision and energy consumption.
3Stability of the object's composition
If target temperature is determined in consideration of maximum amount of generated heat, then temperature stability under high load is improved, but electric power is wastefully consumed when productivity is low
Solution Approach 1:
The patent applies dynamics by making the target temperature adaptive rather than fixed. The control unit adjusts the target temperature based on detected productivity levels, setting higher targets when heat generation is high and lower or suspended targets when productivity is low, thereby maintaining stability when needed while reducing power consumption during low-demand periods.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively reduces electric power consumption by adjusting temperature regulation settings and component power usage, optimizing energy efficiency during periods of low productivity and minimizing unnecessary heating and cooling.
Implementation Method 1
heat exchange with cooling water supplied from facilities
Implementation Method 2
secondary temperature regulation using a high-precision heater with a good response characteristic is executed near a heat generating portion
Data Source
AI summary
An apparatus for manufacturing a device comprises a temperature regulator configured to regulate a temperature of a component associated with manufacture of the device, a controller configured to control the temperature regulator, and a console configured to send command information to the controller upon receiving an input regarding an operation of the temperature regulator, the command information including a command for causing the temperature regulator to operate in an electric power saving mode, and a parameter which specifies a detail of the electric power saving mode.