Temperature Conditioning System Vibration Reduction
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Solution Overview
Problem
Lithographic apparatuses face significant challenges in reducing flow-induced vibrations (FIVs) in temperature conditioning systems, particularly low-frequency vibrations, which can exceed allowed specifications and degrade the performance of sensitive components like the sensor frame of a projection optics box and the wafer stage metro frame.
Innovation Solution
A passive flow-induced vibration reduction system is introduced, featuring a conduit with a liquid-filled cavity and a gas chamber, where a membrane separates the liquid from the gas at ambient pressure, and an end-stop limits membrane deflection, effectively reducing low-frequency FIVs by increasing the compliance of the system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a temperature conditioning system is implemented to control component temperature, then temperature stability is improved, but flow-induced vibrations (FIVs) are generated that degrade system performance
Solution Approach 1:
A compliant element is introduced as an intermediary component in the liquid flow path. This compliant element acts as a mediator that absorbs and attenuates flow-induced vibrations while allowing the temperature conditioning system to continue functioning. The compliant element transforms the rigid flow path into a vibration-damping system, reducing FIVs by up to 2-3 orders of magnitude without compromising temperature control capability.
2Productivity
If liquid flow rate is increased to improve temperature control efficiency, then temperature conditioning performance is improved, but flow-induced vibrations increase
Solution Approach 1:
The physical parameters of the flow path are changed by introducing a compliant element with specific mechanical properties. This compliant element changes the flow path's stiffness and damping characteristics, allowing high liquid flow rates for efficient temperature control while simultaneously attenuating the vibrations generated by this increased flow. The parameter change enables the system to operate at higher productivity without proportionally increasing harmful vibrations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system significantly reduces low-frequency FIVs by up to 2-3 orders of magnitude, ensuring that temperature-controlled components in lithographic apparatuses operate within specified vibration limits, thereby enhancing the accuracy and reliability of the apparatus.
Implementation Method 1
the compliance of the membrane reduces at least the low frequency FIVs in the liquid flowing through the conduit
Implementation Method 2
the compliance of the membrane reduces at least the low frequency FIVs in the liquid flowing through the conduit
Implementation Method 3
an end-stop located on the gas side of the membrane, wherein the end-stop is configured to limit the extent of deflection of the membrane
Data Source
AI summary
A passive flow induced vibration reduction system for use in a temperature conditioning system that controls the temperature of at least one component within a lithographic apparatus. This FIV reduction system includes: a conduit that provides a flow path for a liquid through the system; a liquid filled cavity in fluid connection with the conduit, wherein the fluid connection is provided via one or more openings in the wall of the conduit; a membrane configured such that it separates the liquid in the liquid filled cavity from a gas at a substantially ambient pressure and the membrane is configured such that compliance of the membrane reduces at least low frequency flow induced vibrations in the liquid flowing through the conduit; and an end-stop located on the gas side of the membrane, wherein the end-stop is configured to limit an extent of deflection of the membrane.