Temperature Control Compensation for Aging Thermal Actuators
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Solution Overview
Problem
Existing temperature control systems for semiconductor manufacturing face inaccuracies due to aging components, such as temperature sensors and thermal actuators, leading to process defects and reduced product yield, as they struggle to maintain precise temperature control over time.
Innovation Solution
A temperature control method and system that measures and compensates for changes in components, using resistance measurement units and feedback controllers to generate power control signals, incorporating machine learning or deep learning for error detection and real-time compensation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional temperature control systems are used with fixed components, then initial temperature control precision is achieved, but temperature control accuracy deteriorates over time due to component aging
Solution Approach 1:
The system performs preliminary characterization of component aging trends during initial operation phases. Resistance measurement units measure the resistance values of thermal actuators and temperature sensors at multiple time points to establish baseline aging patterns before production begins, enabling predictive compensation strategies to be pre-configured
Solution Approach 2:
The system continuously measures resistance values of thermal actuators and temperature sensors during operation, compares them against baseline values and aging models, and dynamically adjusts control parameters to compensate for detected component drift, maintaining temperature control accuracy despite component aging
2Measurement precision
If resistance measurement units and compensation mechanisms are added, then temperature control accuracy is maintained over time, but device complexity increases
Solution Approach 1:
The resistance measurement units serve multiple functions: they characterize component aging patterns during initial operation, continuously monitor component health during production, and provide data for dynamic compensation calculations, replacing the need for separate diagnostic and control systems
Solution Approach 2:
The system automatically performs resistance measurements, compares values against baseline data, calculates compensation parameters, and adjusts control outputs without external intervention, enabling the system to self-correct for component aging and eliminate the need for manual calibration or replacement
3Productivity
If continuous resistance measurement and compensation are implemented, then product yield increases through reduced temperature control failures, but loss of time occurs during measurement and calculation processes
Solution Approach 1:
The system performs resistance measurements and compensation updates at optimized periodic intervals rather than continuously, balancing the need for accurate component characterization with the requirement to minimize measurement overhead and maintain high production throughput
Solution Approach 2:
Component aging models and baseline resistance values are established during initial system operation and characterization phases, enabling the system to predict component behavior and pre-calculate compensation parameters, reducing the need for frequent real-time measurements during production
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces temperature control failures, increases product yield, and extends system operation time by predicting and compensating for component changes, maintaining initial settings and ensuring continuous precise temperature control.
Implementation Method 1
one or more resistance measurement units configured to detect characteristic resistance of at least one of the one or more thermal actuators and/or the one or more main sensors
Implementation Method 2
one or more thermal actuators TA such as a heater that directly heats the thermal medium 11 or a heat absorber that absorbs heat from the thermal medium 11
Implementation Method 3
a feedback controller 14 that detects the temperature of the thermal medium 11 and provides temperature control information about the thermal medium 11 to the power controller 12
Data Source
AI summary
Provided are a temperature control system and method. The temperature control system includes a thermal medium on which an object of which temperature is to be controlled is mounted, a resistant thermal actuator installed on the thermal medium and configured to perform heating and/or cooling, a power controller configured to supply controlled power to the resistant thermal actuator, a resistant main sensor configured to detect the temperature of the thermal medium, a resistance value measurement unit configured to detect characteristic resistance of at least one of the resistant thermal actuator and/or the resistant main sensor, and a feedback controller configured to calculate a measurement error or an error of the resistant thermal actuator and/or the resistant main sensor from the characteristic resistance, and based on the measurement error or the error, generate a power control signal compensated for the power controller.