Temperature control device
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Solution Overview
Problem
Existing temperature control devices for semiconductor manufacturing systems lack the ability to accurately control the mixture ratio between lower and higher temperature fluids and their distribution ratios, limiting precise temperature control in multiple steps.
Innovation Solution
A temperature control device with four three-way valves for flow rate control, allowing independent adjustment of the mixture ratio and distribution ratio between lower and higher temperature fluids, along with cooling and heating mechanisms to maintain precise temperature control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional temperature control device with limited valve configuration is used, then the device structure is simple, but the ability to accurately control mixture ratio and distribution ratio between temperature fluids is insufficient
Solution Approach 1:
The temperature control device is segmented into multiple functional valve units, each responsible for specific flow control functions. The first three-way valve controls the mixture ratio of temperature fluids, while the second three-way valve controls the distribution ratio to multiple outlets. This segmentation allows independent control of each parameter, resolving the contradiction between control precision and structural simplicity.
Solution Approach 2:
The device employs dynamic flow control through adjustable valve mechanisms that can independently vary the mixture ratio and distribution ratio. The valves enable continuous adjustment of flow rates, allowing the system to adapt to different temperature control requirements dynamically, thereby achieving high precision control without requiring an overly complex fixed structure.
2Adaptability or versatility
If independent control of mixture ratio and distribution ratio is implemented, then temperature control in multiple steps is achieved, but the number of valves and control mechanisms increases
Solution Approach 1:
Each three-way valve is designed with multi-functionality to reduce the overall number of components. The first three-way valve simultaneously controls the mixture ratio of temperature fluids and can redirect flows as needed. The second three-way valve handles distribution to multiple outlets while also providing flow regulation. This multi-functionality enables multi-step temperature control without requiring a separate valve for each function, thus balancing versatility with manageable device complexity.
3Measurement precision
If precise flow rate control of multiple fluids is implemented, then temperature control accuracy is improved, but the control system complexity increases
Solution Approach 1:
The control system incorporates feedback mechanisms where temperature sensors monitor the mixed fluid temperature and provide signals to the control unit. The control unit processes this feedback and adjusts the valve positions accordingly to maintain the desired temperature. This closed-loop feedback control achieves high temperature control accuracy while keeping the control system complexity manageable through automated regulation rather than manual adjustment of multiple parameters.
Solution Approach 2:
The invention replaces complex mechanical flow control mechanisms with a combination of electronically controlled valves and computer-based control logic. The control unit receives temperature feedback and automatically adjusts valve positions, substituting manual mechanical adjustment with automated electronic control. This reduces the operational complexity of the control system while maintaining high measurement and control precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables high-accuracy control of temperature mixtures and distribution ratios, effectively managing temperature control targets in multiple steps within a desired temperature range.
Implementation Method 1
a first three-way valve for flow rate control configured to mix the lower temperature fluid supplied from the first supply means and the higher temperature fluid supplied from the second supply means while controlling a flow rate of the lower temperature fluid and a flow rate of the higher temperature fluid
Implementation Method 2
first supply means for supplying a lower temperature fluid adjusted to a first predetermined lower temperature
Implementation Method 3
second supply means for supplying a higher temperature fluid adjusted to a second predetermined higher temperature
Implementation Method 4
form a fluid for temperature control and then supply the fluid for temperature control to a temperature control target
Data Source
AI summary
Control temperatures for a temperature control target are controlled in a plurality of steps. A lower temperature fluid supplied from first supply means (101) and a higher temperature fluid supplied from second supply means (102) are mixed together in a first three-way valve (103) for flow rate control to form a fluid for temperature control, and the fluid for temperature control is fed to the temperature control target. The fluid for temperature control returned from the temperature control target is distributed by a second three-way valve (108) for flow rate control so as to be returned to the first supply means and the second supply means. The lower temperature fluid prevented from being supplied from the first supply means to the first three-way valve for flow rate control is returned to the first supply means by a third three-way valve (112) for flow rate control through a bypass flow passage together with the fluid for temperature control distributed by the second three-way valve for flow rate control. Meanwhile, the higher temperature fluid prevented from being supplied from the second supply means to the first three-way valve for flow rate control is returned to the second supply means by a fourth three-way valve (116) for flow rate control through a bypass flow passage together with the fluid for temperature control distributed by the second three-way valve for flow rate control.