Temperature Control Device Sub-Tank Segmentation
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in automatically controlling the liquid amount of the heating medium, leading to potential downtime when the heating medium level decreases, requiring manual refilling and affecting the stability of temperature control.
Innovation Solution
A temperature control device with a main tank, a first sub-tank above the reference position, and a second sub-tank below the reference position, connected by valves, allowing for automatic liquid amount control through a controller that adjusts the valves based on the liquid surface level, ensuring continuous operation without manual intervention.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If manual refilling of heating medium is used, then device complexity is reduced, but productivity decreases due to downtime and loss of time
Solution Approach 1:
The tank system is segmented into a main tank and multiple sub-tanks (first sub-tank and second sub-tank). The sub-tanks are positioned at different heights relative to the main tank, with the first sub-tank above and the second sub-tank below the reference liquid surface level. This segmentation enables automated liquid level control through gravitational flow and valve actuation, resolving the contradiction by automating the refilling process without requiring complex active pumping systems.
Solution Approach 2:
The temperature control device performs self-service through automated liquid level control. When the liquid level in the main tank decreases, the controller automatically opens the first valve to allow heating medium to flow from the first sub-tank to the main tank. When the liquid level increases excessively, the controller opens the second valve to drain excess liquid to the second sub-tank. This self-regulating mechanism eliminates the need for manual intervention and complex control systems.
2Reliability
If automatic liquid level control is implemented, then productivity is improved by preventing downtime, but device complexity increases with multiple tanks and valves
Solution Approach 1:
The system utilizes gravitational potential energy differences created by positioning sub-tanks at different heights relative to the main tank. The first sub-tank is positioned above the reference liquid surface level, and the second sub-tank is positioned below it. This height differential creates natural pressure gradients that drive liquid flow when valves are opened, eliminating the need for complex active pumping or pressurization systems while maintaining reliable automatic control.
Solution Approach 2:
The controller continuously monitors the liquid level in the main tank and provides feedback control. When the liquid level decreases below the reference level, the controller activates the first valve to refill from the first sub-tank. When the liquid level rises above the reference level, the controller activates the second valve to drain to the second sub-tank. This feedback mechanism ensures stable temperature control by maintaining consistent liquid levels, resolving the contradiction between reliability and complexity.
3Loss of time
If manual intervention is required for refilling, then device complexity is low, but loss of time increases due to operational interruptions
Solution Approach 1:
The system prepares heating medium in advance by storing it in the first sub-tank positioned above the main tank. When the main tank's liquid level decreases, the pre-positioned heating medium in the first sub-tank can immediately flow down to refill the main tank through the first valve, eliminating the need for manual refilling operations. This preliminary preparation of liquid reserves resolves the contradiction by enabling continuous operation with automated control.
Solution Approach 2:
The temperature control device autonomously manages its own liquid level without external intervention. The controller detects liquid level changes and automatically actuates the appropriate valves to maintain proper levels, drawing from the first sub-tank when needed and draining to the second sub-tank when excessive. This self-service capability eliminates operational interruptions and maximizes productivity through continuous automated operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables automatic and precise control of the heating medium's liquid amount, preventing downtime and maintaining consistent temperature control during substrate processing, allowing for uninterrupted operation.
Implementation Method 1
a first sub-tank at a position above a reference position of a liquid surface in the main tank, a second sub-tank at a position below the reference position in the main tank
Data Source
AI summary
A temperature control device includes a main tank configured to store a heating medium, a first sub-tank at a position above a reference position in the main tank, a second sub-tank at a position below the reference position in the main tank, a first connector pipe connecting the first sub-tank and the main tank and including a first valve, a second connector pipe connecting the second sub-tank and the main tank and including a second valve, and a controller circuit configured to control the first valve and the second valve based on a liquid amount of the heating medium in the main tank.