Temperature Control Switching for Heat-Emission Disturbances
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Solution Overview
Problem
In semiconductor manufacturing, existing temperature control devices struggle to effectively manage heat emission disturbances during electronic device inspections, leading to inadequate temperature control and increased costs when trying to maintain precise temperature settings under high heat emission conditions.
Innovation Solution
A temperature control device incorporating a sliding mode controller and a cooling mode controller, with a switching controller that determines whether to use the output of the sliding mode controller or the cooling mode controller based on a nonlinear term, to dynamically adjust between heating and cooling sources for precise temperature control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional temperature control device uses a single control mode (heating or cooling), then the device structure is simple, but the temperature control precision deteriorates under high heat emission disturbances
Solution Approach 1:
The patent implements dynamic switching between sliding mode control and cooling mode control based on real-time temperature conditions. The switching controller dynamically selects the appropriate control mode by evaluating the nonlinear term value, enabling the system to adapt to varying heat emission disturbances and maintain precise temperature control throughout the inspection process.
Solution Approach 2:
The patent changes the control parameter by introducing a nonlinear term evaluation mechanism that determines whether to apply sliding mode control or cooling mode control. This parameter-based switching allows the system to optimize temperature control precision by selecting the most appropriate control strategy based on current thermal conditions.
2Reliability
If a temperature control device uses sliding mode control to handle heat emission disturbances, then temperature control robustness improves, but energy consumption increases
Solution Approach 1:
The system dynamically switches between sliding mode control and cooling mode control based on real-time evaluation of the nonlinear term. This dynamic adaptation allows the system to use the more energy-intensive sliding mode control only when necessary for maintaining robust temperature control under significant heat emission disturbances, while using the more energy-efficient cooling mode control during normal operating conditions.
Solution Approach 2:
The patent introduces a parameter-based switching mechanism that evaluates the nonlinear term to determine the appropriate control mode. This parameter-driven approach enables the system to optimize the balance between temperature control robustness and energy consumption by selecting the most appropriate control strategy based on current thermal conditions.
3Use of energy by moving object
If a temperature control device uses only cooling mode control under high heat emission, then energy consumption decreases, but temperature control precision deteriorates
Solution Approach 1:
The system implements dynamic switching between cooling mode control and sliding mode control based on real-time temperature conditions. The switching controller continuously evaluates the nonlinear term and dynamically selects the appropriate control mode, enabling the system to maintain precise temperature control during critical phases while using energy-efficient cooling mode control during stable operating conditions.
Solution Approach 2:
The patent employs a parameter-based switching mechanism that uses the nonlinear term evaluation to determine when to transition between control modes. This parameter-driven approach allows the system to optimize the balance between energy consumption and temperature control precision by selecting the most appropriate control strategy based on current thermal conditions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables robust and efficient temperature control, even under severe heat emission disturbances, by switching between sliding mode and cooling mode controls, ensuring accurate temperature management and reducing operational costs.
Implementation Method 1
a heater having a heating source configured to heat the temperature control object
Implementation Method 2
a cooler having a cooling source configured to cool the temperature control object
Data Source
AI summary
A temperature control device for controlling a temperature of an object, the temperature control device includes a heater having a heating source configured to heat the object, a cooler having a cooling source configured to cool the object; and a temperature controller configured to control the heating source and the cooling source. The temperature controller includes a sliding mode controller configured to supply power to the heating source as an operation amount, a cooling mode controller configured to supply power to the cooling source as an operation amount, and a switching controller configured to determine whether an output of the sliding mode controller will be output to the heating source as a first operation amount, or an output of the cooling mode controller will be used as a second operation amount, based on a nonlinear term value of the output of the sliding mode controller.