Temperature control system and method TDSF plus
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Solution Overview
Problem
Existing temperature control methods in the semiconductor industry face challenges in achieving precise and stable temperature control due to phase changes in refrigerants, which affect thermal energy transfer and storage, limiting flexibility and efficiency.
Innovation Solution
The implementation of a two-phase thermodynamic system with a thermal capacitor and additional control loops that allow for selective retention and manipulation of thermal energy, incorporating a thermal capacitor to store energy and a back pressure control section for enhanced temperature control, along with an ambient temperature evaporator for efficient heating and cooling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a two-phase refrigerant system is used for temperature control, then temperature control range and flexibility are improved, but temperature stability and control precision deteriorate due to phase changes
Solution Approach 1:
The system divides the temperature control function into multiple independent control loops: a first control loop manages the refrigerant flow rate to the thermal load, while a second control loop manages the refrigerant back pressure. This segmentation allows each loop to handle specific aspects of temperature control, improving overall stability despite the use of two-phase refrigerant.
Solution Approach 2:
The system incorporates feedback mechanisms where temperature sensors monitor the thermal load temperature and feed signals back to the controller. The controller adjusts both the refrigerant flow rate and back pressure based on this feedback, enabling precise temperature maintenance despite phase changes in the refrigerant.
2Speed
If refrigerant flow rate is increased for faster temperature response, then temperature response speed is improved, but temperature control precision deteriorates
Solution Approach 1:
The system dynamically adjusts refrigerant flow rate based on real-time temperature deviations. During transient conditions or large temperature deviations, the flow rate is increased for rapid response. During steady-state operation, the flow rate is precisely modulated to maintain exact temperature control, optimizing both response speed and precision.
Solution Approach 2:
The system changes multiple parameters simultaneously - both refrigerant flow rate and back pressure - to achieve temperature control. This multi-parameter adjustment provides finer control resolution and allows the system to respond quickly to temperature changes while maintaining precision through coordinated parameter optimization.
3Loss of energy
If thermal energy storage capacity is increased using thermal capacitor, then energy efficiency is improved, but system complexity increases
Solution Approach 1:
The thermal capacitor serves multiple functions: it stores thermal energy for later use, acts as a buffer to smooth temperature fluctuations, and provides a means to recover waste heat from the refrigerant. This multi-functionality justifies the added component by providing energy efficiency benefits across multiple system operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach provides improved temperature control precision, efficiency, and versatility by allowing for dynamic temperature adjustments and efficient thermal energy management, enabling applications such as on-site preparation of frozen foods with high reliability and energy efficiency.
Implementation Method 1
a reservoir of the refrigerant fluid may be employed as a thermal capacitor in the control loop paths that transfer refrigerant fluid so as to receive and retain thermal energy for particular purposes in thermal energy cycling or transfer
Implementation Method 2
a two phase medium is not only temperature controlled but is itself in direct thermal contact with the thermal load... varying from pure gas in an initial state through an intermediate range in which gas and liquid phases are mixed to provide a controllable temperature and pressure
Implementation Method 3
one of which is controlled in rate while the other flow, which is then differentially variable, dependent on the controlled flow, is first condensed and then expanded to a lower temperature level
Implementation Method 4
an ambient temperature evaporator for efficient heating and cooling
Data Source
AI summary
A temperature control system is disclosed where thermal energy generated by pressurization of a gaseous medium is stored at a selected temperature level so that it is later readily accessible. Temperature control of a two-phase medium is exercised across selectable dynamic ranges and with different resolutions and the control can be exerted by varying the input flow rate of a mixture applied to a thermal load, or by controlling the back pressure of the flow through the thermal load.