Temperature control system including contactor assembly

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Solution Overview

Problem

Existing temperature control systems for electrical testing equipment, such as semiconductor devices, struggle to maintain precise temperature control during testing due to fluctuations caused by device self-heating, leading to inaccurate results.

Innovation Solution

A temperature control system that utilizes fluid flow control through contactor assemblies, employing valves and sensors to regulate heating or cooling based on contact temperature, ensuring setpoint temperature maintenance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If a thin heater is used to heat devices during testing, then the devices can be heated to the desired temperature, but the temperature becomes unstable when devices produce self-heat

Engineering Contradiction:
Improvedevice temperatureVSAvoidtemperature stability
Core Design Contradiction:
TemperatureVSStability of the object's composition

Solution Approach 1:

The patent introduces a fluid (gas or liquid) as an intermediary cooling medium that flows through channels in the contactor socket. This fluid acts as a heat sink to absorb self-heat from the device under test, providing stable temperature control. The fluid flow rate can be adjusted to compensate for temperature changes, maintaining temperature stability despite device self-heating.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent employs pneumatic or hydraulic principles by using pressurized gas or liquid flow through the contactor socket channels. The fluid is delivered under pressure to ensure adequate flow rate for heat removal, and the pressure can be controlled to adjust the cooling effect. This allows dynamic compensation for device self-heat and maintains stable testing conditions.

Inventive Principle:
Principle #29Pneumatics and hydraulics

2Temperature

If air pathways are manually opened and closed to control fluid flow, then temperature can be adjusted, but the control is imprecise and labor-intensive

Engineering Contradiction:
Improvecontact temperatureVSAvoidtemperature control precision
Core Design Contradiction:
TemperatureVSMeasurement precision

Solution Approach 1:

The patent incorporates temperature sensors that continuously monitor the temperature of the device under test or the contactor socket. This temperature information is fed back to a control system that automatically adjusts the fluid flow rate to maintain the desired setpoint temperature. The feedback loop enables precise temperature control without manual intervention, compensating for device self-heat in real-time.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent replaces manual mechanical control of air pathways with an automated control system. Instead of manually opening and closing valves or adjusting flow, the system uses electronic control to regulate fluid flow based on temperature sensor feedback. This substitution of mechanical manual control with automated sensor-based control significantly improves temperature control precision.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Temperature

If fluid flow is increased to cool devices, then self-heat can be removed, but the system complexity and control difficulty increase

Engineering Contradiction:
Improvetemperature control capabilityVSAvoidsystem complexity
Core Design Contradiction:
TemperatureVSDevice complexity

Solution Approach 1:

The patent integrates the temperature control function directly into the contactor socket structure itself. The fluid channels are built into the socket, combining the electrical contact function and thermal management function in a single component. This merging eliminates the need for separate cooling systems and reduces overall system complexity while maintaining effective temperature control.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The contactor socket is designed to perform multiple functions: electrical contact for device testing and thermal management through integrated fluid channels. The same structure that provides electrical connectivity also provides the cooling pathway, making the system more efficient and less complex than having separate dedicated cooling equipment.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances throughput by stabilizing contact temperatures, thereby improving the accuracy of electrical testing results.

Implementation Method 1

Fluid flow control through contactor assemblies, employing valves and sensors to regulate heating or cooling based on contact temperature

Methodology Applied
Scientific EffectHeat transfer: Conduction (thermal)

Data Source

PatentEP4364197B1Temperature control system including contactor assembly
Publication Date: 2026.03.18 DELTA DESIGN INC
  • EP4364197B1 patent drawingFigure 1
  • EP4364197B1 patent drawingFigure 2
  • EP4364197B1 patent drawingFigure 3

AI summary

A method for controlling temperature in a temperature control system. The method includes providing a temperature control system including a controller, a first contactor assembly having a first channel system, a plurality of first contacts, each of the first contacts including a portion that is disposed within the first channel system, and one or more of a first exhaust valve or a first inlet valve, and a second contactor assembly having a second channel system, a plurality of second contacts, each of the second contacts including a portion that is disposed within the second channel system, and one or more of a second exhaust valve or a second inlet valve. The method also includes receiving, by the first contactor assembly, a fluid at a first temperature. The method also includes receiving, by the second contactor assembly, the fluid at the first temperature.