Temperature Measuring Mechanism for Rotating Stage

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Solution Overview

Problem

Existing temperature measurement techniques for rotating stages, such as those in processing apparatuses, face challenges in accuracy and stability due to the use of sliding members, which can introduce measurement errors and instability, especially at extremely low temperatures.

Innovation Solution

A temperature measuring mechanism that includes a temperature detection contact portion and a temperature detector separated from the stage, allowing for contact only during measurement, utilizing high thermal conductivity materials and a sheath thermocouple with an indium sheet for accurate and stable temperature measurement without relying on sliding members.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a temperature sensor is embedded in a rotating stage with a sliding unit for signal transmission, then temperature measurement is enabled during rotation, but measurement accuracy and stability deteriorate due to sliding member errors

Engineering Contradiction:

Improvetemperature measurement accuracyVSAvoidmeasurement stability

Core Design Contradiction:

Measurement precisionVSReliability

Solution Approach 1:

The temperature sensor is extracted from the rotating stage and placed in a stationary position. The measurement contact portion is separated from the stage body, allowing the sensor to remain fixed while only the contact portion interacts with the stage during measurement, eliminating sliding member errors associated with rotating sensors

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

A temperature detection contact portion serves as an intermediary between the stationary temperature sensor and the rotating stage. This contact portion transfers thermal energy from the stage to the sensor during brief contact periods without requiring continuous mechanical connection or sliding mechanisms

Inventive Principle:

Principle #24Intermediary (Mediator)

2Duration of action of moving object

If a temperature sensor is embedded in the rotating stage, then continuous temperature monitoring is possible, but the substrate placement area is reduced and measurement errors occur due to rotation

Engineering Contradiction:

Improvecontinuous monitoring capabilityVSAvoidsubstrate placement area

Core Design Contradiction:

Duration of action of moving objectVSArea of stationary object

Solution Approach 1:

The temperature sensor is extracted from the rotating stage structure and positioned stationary below the stage. This removes the sensor from the substrate placement area, maximizing the available surface area while enabling temperature measurement through periodic contact

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

Temperature measurement occurs through periodic contact between the temperature detection contact portion and the stage, rather than continuous contact. The stage rotates to bring the contact portion into alignment with the stationary sensor, enabling intermittent measurement without interfering with substrate placement

Inventive Principle:

Principle #19Periodic action

3Ease of operation

If sliding members are used to transmit sensor output from rotating stage, then signal transmission during rotation is enabled, but measurement errors and instability increase

Engineering Contradiction:

Improvesignal transmission capabilityVSAvoidtemperature measurement accuracy

Core Design Contradiction:

Ease of operationVSMeasurement precision

Solution Approach 1:

The mechanical sliding connection is replaced with a stationary sensor system. Instead of mechanically transmitting signals from a rotating sensor through sliding contacts, the system uses a fixed sensor that receives thermal energy through periodic contact, eliminating the harmful mechanical sliding mechanism

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The temperature detection contact portion acts as a thermal intermediary, transferring heat from the rotating stage to the stationary sensor without requiring mechanical signal transmission pathways. This eliminates sliding member errors by removing the mechanical connection entirely

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables precise and stable temperature measurement of a rotating stage at extremely low temperatures, minimizing heat transfer and measurement errors, and allowing for accurate temperature detection at arbitrary times, including before film forming processing.

Implementation Method 1

a temperature detector 92 having a sheath thermocouple 125

Methodology Applied

Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

utilizing high thermal conductivity materials and a sheath thermocouple with an indium sheet

Methodology Applied

Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS11605547B2Temperature measuring mechanism, temperature measuring method, and stage device

Publication Date: 2023.03.14 TOKYO ELECTRON LTD

AI summary

A temperature measuring device that measures a temperature of a rotatable stage that holds a substrate, includes: a contact portion provided at a position that does not hinder placing of the substrate on the stage, and a temperature detector having a temperature sensor, and provided at a position separated from the temperature detection contact portion except when measuring a temperature. When measuring the temperature of the stage, the temperature detection contact portion and the temperature detector are relatively moved and brought into contact with each other in a state where the stage is not rotating to detect the temperature of the stage.