Temperature-Sensing Support Base for Wet Grinding Workpieces

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Solution Overview

Problem

During grinding and polishing processes, it is challenging to measure the temperature at the contact point between the tool and workpiece, especially when a working fluid like pure water is supplied, as excessive temperature can lead to processing defects such as tool damage or workpiece burning.

Innovation Solution

A support base equipped with a flat plate-shaped box member, a temperature measurement unit, and a battery, which includes a temperature measuring instrument and a recording unit, allowing for real-time temperature measurement and wireless communication of data, and optionally uses electrostatic attraction to secure the workpiece.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If a working fluid such as pure water is supplied during grinding or polishing, then cooling effect is improved, but temperature measurement at the processing point becomes difficult

Engineering Contradiction:
Improvecooling effectVSAvoidtemperature measurement
Core Design Contradiction:
TemperatureVSDifficulty of detecting and measuring

Solution Approach 1:

The patent introduces a temperature measurement unit as an intermediary device that can measure temperature through the support base without being directly exposed to the working fluid. The support base acts as a mediator that transmits thermal information from the processing point to the measurement unit while protecting it from the water supply environment.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces direct mechanical contact-based temperature measurement (which would be affected by water) with a sensor system integrated into the support base structure. The temperature measurement unit uses thermal conduction through the base material to detect temperature indirectly, substituting direct measurement at the contact point with indirect measurement through the support structure.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Reliability

If temperature measurement device is added to monitor processing point, then temperature control is improved, but device complexity increases

Engineering Contradiction:
Improvetemperature controlVSAvoiddevice complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges the temperature measurement unit with the support base structure, combining two previously separate functions (support and measurement) into a single integrated component. The measurement unit is accommodated within the box member of the support base, eliminating the need for separate measurement equipment and reducing overall system complexity.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The support base is transformed into a multi-functional device that simultaneously provides mechanical support for the workpiece and temperature measurement capabilities. The box member structure serves both as the support base framework and as the housing for the temperature measurement unit and battery, creating a universal component with multiple functions.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Measurement precision

If temperature measurement and recording system is integrated into support base, then temperature monitoring capability is improved, but support base complexity increases

Engineering Contradiction:
Improvetemperature monitoring capabilityVSAvoidsupport base complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent applies the nesting principle by placing the temperature measurement unit and battery inside the box member of the support base. The measurement unit is nested within the structural framework, and the battery is accommodated within the same housing space, creating a compact integrated system where components are nested within each other's spatial envelope.

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The box member structure serves as a flexible housing that accommodates the temperature measurement unit and battery while maintaining the structural integrity of the support base. The box member acts as a protective shell that integrates the electronic components without adding significant structural complexity to the overall support base design.

Inventive Principle:
Principle #30Flexible shells and thin films

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables accurate temperature monitoring at the processing point, preventing defects by allowing for timely intervention when temperature thresholds are exceeded, and facilitating analysis of processing defects through recorded data.

Implementation Method 1

a temperature measuring instrument configured to measure a temperature at the support face

Methodology Applied
Scientific EffectTemperature measurement:

Implementation Method 2

a battery accommodated in the box member and serving as a power supply for the temperature measurement unit

Methodology Applied
Scientific EffectBattery: Battery (electricity)

Implementation Method 3

a recording unit configured to record the temperature measured by the temperature measuring instrument

Methodology Applied
Scientific EffectData recording:

Implementation Method 4

the temperature measurement unit further includes wireless communication means for sending out originating temperature information measured by the temperature measuring instrument to the outside of the box member

Methodology Applied
Scientific EffectWireless communication:

Implementation Method 5

an electrode to which power is supplied from the battery is provided on the support face, and the workpiece is electrostatically attracted to the support face

Methodology Applied
Scientific EffectElectrostatic attraction: Electrostatics

Data Source

PatentUS11241770B2Support base
Publication Date: 2022.02.08 DISCO CORP
  • US11241770B2 patent drawing
  • US11241770B2 patent drawing
  • US11241770B2 patent drawing

AI summary

A support base supports a plate-shaped workpiece. The support base includes a flat plate-shaped box member having a support face for supporting a workpiece and a placement face that is a face on the opposite side to the support face and is placed on a holding face of a chuck table, a temperature measurement unit accommodated in the box member, and a battery accommodated in the box member and serving as a power supply for the temperature measurement unit. The temperature measurement unit includes a temperature measuring instrument that measures a temperature at the support face, and a recording unit that records the temperature measured by the temperature measuring instrument.