Temperature Sensor Circuit Layout for Stacked-Channel ICs

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Solution Overview

Problem

Temperature sensor circuits in integrated circuit devices face challenges with accurate temperature determination due to high voltage stress and incompatibility with new technologies, leading to integrity issues and increased active footprint.

Innovation Solution

The integration of a temperature sensor circuit with vertically stacked horizontal channels operating at a low power supply potential, utilizing a combination of different process technologies for the transistors and temperature sensor components, and employing a reference voltage generator and step-down circuits to provide temperature signals without overstressing the gate insulating layers.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the operating voltage of the temperature sensor is increased to enable operation, then the temperature sensor can operate, but the transistors experience high voltage stress causing integrity problems

Engineering Contradiction:
Improvetemperature sensor operationVSAvoidtransistor integrity
Core Design Contradiction:
ReliabilityVSStrength

Solution Approach 1:

The temperature sensor circuit is segmented into two distinct portions: a first circuit portion formed using first process technology and a second circuit portion formed using second process technology. This segmentation allows each portion to be optimized for its specific voltage requirements, with the second portion operating at a higher voltage that would otherwise stress transistors in the first portion.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different process technologies are applied to different portions of the temperature sensor circuit based on their specific requirements. The first circuit portion uses first process technology optimized for low-voltage operation, while the second circuit portion uses second process technology optimized for high-voltage operation, allowing each region to have the appropriate characteristics for its function.

Inventive Principle:
Principle #3Local quality

2Adaptability or versatility

If new technology is used for transistors, then device compatibility is improved, but temperature sensor circuit structures become incompatible and consume more active footprint

Engineering Contradiction:
Improvedevice compatibilityVSAvoidtemperature sensor structure compatibility
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The temperature sensor circuit is designed to work with transistors having vertically stacked horizontal channels, which is a universal structure in modern integrated circuits. By using this common transistor architecture, the temperature sensor can be integrated with various device technologies without requiring specialized structures, thereby improving compatibility while maintaining a compact footprint.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Productivity

If transistor size is reduced, then device integration is improved, but temperature sensor circuits cannot operate properly

Engineering Contradiction:
Improvedevice integrationVSAvoidtemperature sensor operation
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The invention moves the temperature sensor operation to a different voltage dimension by using a higher voltage for the second circuit portion. This allows the temperature sensor to function properly even when transistor sizes are reduced for better integration, as the higher voltage compensates for the smaller device dimensions and maintains adequate signal levels for sensing operation.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Data Source

PatentUS11777486B2Temperature sensor circuits for integrated circuit devices
Publication Date: 2023.10.03 SAMSUNG ELECTRONICS CO LTD
  • US11777486B2 patent drawing
  • US11777486B2 patent drawing
  • US11777486B2 patent drawing

AI summary

An integrated circuit device having insulated gate field effect transistors (IGFETs) having a plurality of horizontally disposed channels that can be vertically aligned above a substrate with each channel being surrounded by a gate structure has been disclosed. The integrated circuit device may include a temperature sensor circuit and core circuitry. The temperature senor circuit may include at least one portion formed in a region other than the region that the IGFETs are formed as well as at least another portion formed in the region that the IGFETs having a plurality of horizontally disposed channels that can be vertically aligned above a substrate with each channel being surrounded by a gate structure are formed. By forming a portion of the temperature sensor circuit in regions below the IGFETs, an older process technology may be used and device size may be decreased and cost may be reduced.