Template Holding Protrusions for Semiconductor Imprint Alignment
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Solution Overview
Problem
In semiconductor device manufacturing, precise positioning of pattern forming templates is challenging due to stress-induced movement and slipping during curing, leading to defects like position misalignment and particle generation, which affect the quality of the embossed pattern.
Innovation Solution
A pattern forming device with a holding part that uses contact portions with protrusions to securely hold the template, reducing stress and particle generation by dispersing pressure and minimizing contact area, while maintaining precise alignment and strain correction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the template is held using conventional contact methods, then the template can be secured during imprinting, but stress-induced movement and slipping occur during curing, causing position misalignment and particle generation
Solution Approach 1:
The contact portion is divided into multiple protrusions (first, second, third protrusions) that contact different regions of the template separately. This segmentation allows independent stress distribution at each contact point, preventing concentrated stress-induced movement while maintaining overall template stability during curing
Solution Approach 2:
Different protrusions contact specific localized regions of the template (side surface, bottom surface, or both) with optimized contact geometry. The contact surfaces of protrusions are designed with specific shapes to match the template surface characteristics, ensuring optimal local contact quality that prevents slipping while minimizing stress-induced deformation
2Reliability
If conventional contact methods are used to hold the template, then the template can be secured, but particles are generated due to slipping between the template and holding members
Solution Approach 1:
The contact portion is segmented into multiple protrusions that contact the template at distributed locations. This segmentation eliminates large-area sliding contact that generates particles, replacing it with multiple small-point contacts that minimize friction and particle generation while maintaining secure template holding
Solution Approach 2:
The protrusions act as intermediary contact elements between the holding member and the template. These protrusions provide a controlled interface that prevents direct large-area contact and slipping, thereby reducing particle generation while maintaining reliable template securing
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances the precision of pattern mapping and reduces defects, thereby increasing the manufacturing yield of semiconductor devices by stabilizing the template and minimizing foreign objects on the substrate.
Implementation Method 1
The substance being imprinted is held in this state until it fills the pattern of the template as a result of capillary action
Data Source
AI summary
A pattern forming device uses a template having a plurality of protrusions and recesses configured to imprint a reverse image thereof on a resin on a substrate. The pattern forming device has a holding part, a stage, a driving part, and a curing part. The holding part includes a contact portion having a friction reducing contact portion, which is configured to engage against the template to hold the template. The stage carries the substrate. The driving part is configured to move at least one of the holding part and the stage to have the pattern in contact with the resin. The curing part cures the resin. The contact portion has a main body portion configured to move forward/backward with respect to the template and a tip portion arranged on the main body portion.